Light-emitting diode and method for manufacturing same, integrated light-emitting diode and method for manufacturing same, method for growing a nitride-based iii-v group compound semiconductor, substrate for growing a nitride-based iii-v group compound semiconductor, light source cell unit, light-emitting diode backlight, light-emitting diode illuminating device, light-emitting diode display and electronic instrument, electronic device and method for manufacturing same

ABSTRACT

A method for manufacturing a light-emitting diode, which includes the steps of: providing a substrate having a plurality of protruded portions on one main surface thereof wherein the protruded portion is made of a material different in type from that of the substrate and growing a first nitride-based III-V Group compound semiconductor layer on each recess portion of the substrate through a state of making a triangle in section wherein a bottom surface of the recess portion becomes a base of the triangle; laterally growing a second nitride-based III-V Group compound semiconductor layer on the substrate from the first nitride-based III-V Group compound semiconductor layer; and successively growing, on the second nitride-based III-V Group compound semiconductor layer, a third nitride-based III-V Group compound semiconductor layer of a first conduction type, an active layer, and a fourth nitride-based III-V compound semiconductor layer of a second conduction type.

CROSS REFERENCES TO RELATED APPLICATIONS

The present application contains subject matter related to JapanesePatent Application JP 2005-275504 filed with the Japanese Patent Officeon Sep. 22, 2005, and Japanese Patent Application JP 2006-215342 filedwith the Japanese Patent Office on Aug. 8, 2006, the entire contents ofwhich being incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to a light-emitting diode and a method formanufacturing same, an integrated light-emitting diode and a method formaking same, a method for growing a nitride-based III-V Group compoundsemiconductor, a substrate for growing a nitride-based III-V Groupcompound semiconductor, a light source cell unit, a light-emitting diodebacklight, a light-emitting diode illuminating device, a light emittingdiode display, an electronic instrument, and an electronic device and amethod for manufacturing same. The invention is suited for application,for example, to a light-emitting diode using a nitride-based III-V Groupcompound semiconductor and also to various types of instruments ordevices using the light-emitting diode.

2. Description of the Related Art

In case where a GaN semiconductor is epitaxially grown on ahetero-substrate such as a sapphire substrate, crystal defects,especially, threading dislocations, occur in high density owing to thegreat difference in lattice constant or coefficient of thermal expansiontherebetween.

To avoid this problem, a dislocation density reducing technique based onselective lateral growth has been hitherto in wide use. In thistechnique, a GaN semiconductor is epitaxially grown on a sapphiresubstrate or the like, after which the substrate is removed from acrystal growth device. A growth mask made of a SiO₂ film or the like isformed on the GaN semiconductor layer, and the substrate is returned tothe crystal growth device, followed by epitaxially growing a GaNsemiconductor once more by use of the growth mask.

According to this technique, although the dislocation density in theupper GaN semiconductor layer can be reduced, the epitaxial growth isneeded twice, resulting in high costs.

To cope with this, there has been proposed a method, in which ahetero-substrate is subjected to patterned indentation and a GaNsemiconductor is epitaxially grown on the indented substrate (e.g. seeMitsubishi Cable Industries Review No. 98, October, 2001, entitled“Development of High Output UV LED Using an LEPS Technique” and JapanesePatent Laid-open Nos. 2004-6931 and 2004-6937). The outline of thismethod is shown in FIGS. 77A to 77C. According to this method, as shownin FIG. 77A, patterned indentation is made in one main surface of the cface of a sapphire substrate 101. A recessed portion is indicated byreference numeral 101 a and a protruded portion is indicated byreference numeral 101 b. These recessed portions 101 a and protrudedportions 101 b, respectively, extend along a <1-100> direction of thesapphire substrate 101. Next, a GaN semiconductor layer 102 is formedover the sapphire substrate 101 via the steps shown in FIGS. 77B and77C. In FIG. 77C, the dotted line indicates a growth interface in thecourse of the growth. As is particularly shown in FIG. 77C, it ischaracteristically observed that the recessed portion 101 a isunfavorably formed with a space 103 between the sapphire substrate 101and the GaN semiconductor 102. The distribution of crystal defects inthe GaN semiconductor layer 102 grown by the method is schematicallyshown in FIG. 78. As shown in FIG. 78, threading dislocations 104 occurat a portion over the protruded portion 101 b of the GaN semiconductorlayer 102 in a direction vertical to the interface with an upper surfaceof the protruded portion 101 b, thereby forming a high defect densityregion 105. On the other hand, an area or portion above the recessedportion 101 a becomes a low defect density region 106 at a portionbetween the high defect density regions 105.

It will be noted that although, in FIG. 77C, the GaN semiconductor layer102 beneath the space 103 formed within the recessed portion 101 a ofthe sapphire substrate 101 is buried in the form of a rectangle, theburied form may be triangular in some case. In the latter case, the GaNsemiconductor layer 102 buried inside the recessed portion 101 a is incontact with the GaN semiconductor layer 102 laterally grown from theprotruded portion 101 b, with the possibility that a space is formed,like the rectangular form.

For reference, there is shown in FIGS. 79A to 79D how a GaNsemiconductor layer 102 is grown in case where the direction ofextension of the recessed portions 101 a and the protruded portions 101b is a <11-20> direction of intersecting at right angles with a <1-100>direction of the sapphire substrate 101.

FIGS. 80A to 80F schematically show another conventional growth method(Refer to, for example, Japanese Patent Laid-open No. 2003-31441). Inthis method, as shown in FIG. 80A, a sapphire substrate 101 subjected topatterned indentation is used, and a GaN semiconductor layer 102 isgrown thereon through the steps shown in FIGS. 80B to 80F. It is statedthat according to the method, the GaN semiconductor layer 102 can begrown without formation of a space in relation with the sapphiresubstrate 101.

A further growth method has been proposed in which protruded portionsare formed on a substrate using a material different from that of thesubstrate and a nitride III-V Group compound semiconductor starts to begrown from a recess portion between the protruded portions (see, forexample, Japanese patent Laid-open No. 2003-324069 and Japanese PatentNo. 2830814). However, the manner of the growth in this method greatlydiffers from that of the present invention.

Only for reference, main crystal faces and crystal orientations ofsapphire are shown in FIGS. 81A and 81B.

SUMMARY OF THE INVENTION

With the conventional method illustrated with respect to FIGS. 77A to77C, the formation of the space 103 between the sapphire substrate 101and the GaN semiconductor layer 102 is as stated hereinabove. Accordingto the results of a test made by us, where a light-emitting diodestructure in which a GaN semiconductor layer is formed on the GaNsemiconductor layer 102 is formed, there is left a problem that theluminous efficiency of the light-emitting diode is low. This isconsidered for the reason that light generated from an active layer inthe course of operation of the light-emitting diode is repeatedlyreflected at the inside of the space 103 and is eventually absorbed,thereby worsening a light extraction efficiency.

On the other hand, with the conventional growth method illustrated withrespect to 80A to 80F, although it is stated that the space 103 is notformed between the sapphire substrate 101 and the GaN semiconductorlayer 102, it is considered that a difficulty is involved in reducingthe dislocation density in the GaN semiconductor layer 102 to such alevel as that of the conventional growth method shown in FIGS. 77A to77C. For this, where a light-emitting diode structure in which a GaNsemiconductor layer is grown on the GaN semiconductor layer 102 havingthis high dislocation density is formed, the dislocation density ofthese GaN semiconductor layers becomes high, thereby inviting a loweringof luminous efficiency.

Further, in either of the conventional growth methods illustrated inFIGS. 77A to 77C and 80A to 80F, dry etching is usually used to subjectthe surface of the sapphire substrate 101 to patterned indentation, butthe sapphire substrate 101 is very unlikely to undergo dry etching, thusnot only taking a long time for the etching, but also being low inprocessing accuracy.

Accordingly, it is desirable to provide a light-emitting diode and amethod for manufacturing such a diode in which a light extractionefficiency is remarkably improved owing to the absence of such a spaceas set out hereinabove, a nitride-based III-V Group compoundsemiconductor layer constituting a light-emitting diode is significantlyimproved in crystallinity to provide a very high luminous efficiency,and the diode can be manufactured at low costs by a single run ofepitaxial growth, with the ease in processing of a substrate to providea protrusion and recess pattern thereon.

It is further desirable to provide an integrated light-emitting diodeand a method for manufacturing same in a manner as set out in the firstdesire, a method for growing a nitride-based III-V Group compoundsemiconductor conveniently used for the manufacture of such alight-emitting diode and integrated light-emitting diode as mentionedabove, and a substrate useful for the growth of such a nitride-basedIII-V Group compound semiconductor.

It is still further desirable to provide a high-performance light sourcecell unit, light-emitting diode backlight, light-emitting diodeilluminating device, light-emitting diode display and electronic device,each using such a diode as mentioned above.

It is yet further desirable to provide electronic devices such as alight-emitting diode, a semiconductor laser, a transistor and the likeand a method for manufacturing such devices, in which characteristicproperties are very good owing to the absence of such a space as set outhereinbefore and an remarkable improvement of crystallinity of a layermaterial constituting a device structure, such electronic devices can bemanufactured at low costs by a single run of epitaxial growth, andpatterned indentation of a substrate is simple.

In order to achieve those desires, according to a first embodiment ofthe invention, there is provided a method for manufacturing alight-emitting diode. The method includes a providing step, laterallygrowing step, and successively growing step. The providing step providesa substrate having a plurality of protruded portions on one main surfacethereof, in which the protruded portion is made of a material differentin type from that of the substrate, and grows a first nitride-basedIII-V Group compound semiconductor layer on each recess portion of thesubstrate through a state of making a triangle in section wherein abottom surface of the recess portion becomes a base of the triangle. Thelaterally growing step grows a second nitride-based III-V Group compoundsemiconductor layer on the substrate from the first nitride-based III-VGroup compound semiconductor layer. The successively growing step growsa third nitride-based III-V Group compound semiconductor layer of afirst conduction type, an active layer, and a fourth nitride-based III-Vcompound semiconductor layer of a second conduction type on the secondnitride-based III-V Group compound semiconductor layer.

The first nitride-based III-V compound semiconductor layer and thesecond nitride-based III-V compound semiconductor layer may be of anyconduction type and may be either of a p-type, an n-type or an i-type,and may be of the same conduction type or may be different in conductiontype. Moreover, two or more portions that differ in conduction type mayexist in the first nitride-based III-V compound semiconductor layer orthe second nitride-based III-V compound semiconductor layer.

Typically, when the first nitride-based III-V Group compoundsemiconductor layer is grown, a dislocation occurs in a verticaldirection relative to the one main surface of the substrate from theinterface with the bottom surface of the recess portion of thesubstrate. At the time when this dislocation arrives at an inclined faceor its neighborhood of the first nitride-based III-V compoundsemiconductor layer in such a state of making a triangle in section asset forth above, the dislocation is bent thereat in a direction parallelto the one main surface as being kept away from the triangular portion.The triangle in section or triangular shape at the triangular portion isintended to mean not only an exact triangle, but also those shapesregarded approximately as a triangle and including, for example, oneshaving rounded apexes herein and whenever it appears hereinafter.Favorably, at the initial stage of growth of the first nitride-basedIII-V compound semiconductor layer, a plurality of fine nuclei ormicronuclei occur at the bottom surface of the recess portion of thesubstrate, and a dislocation, which occurs in a vertical directionrelative to the one main surface of the substrate from the interfacewith the bottom surface of the recess portion of the substrate in thecourse of growth and combination of these fine nuclei, is repeatedlybent thereat in directions parallel to the one main surface. In thisway, a dislocation passing through toward the upper side at the stage ofgrowth of the first nitride-based III-V compound semiconductor layer canbe reduced in number.

Typically, the protruded portions and recess portions are alternatelyformed at intervals on the one main surface of the substrate. In thiscase, the alternate intervals of the protruded portions and recessportions are preferably at 3 to 5 μm. The ratio between the length of abase of the protruded portion and the length of a base of the recessportion is preferably at 0.5 to 3, more preferably at approximately 0.5.The height of the protruded portion as viewed from the one main surfaceof the substrate is preferably at 0.3 μm or over, more preferably at 1μm or over. This protruded portion should favorably have a side faceinclined relative to the one main surface of the substrate (e.g. a sideface in contact with the one main surface of the substrate). When anangle established between the side face and the one main surface of thesubstrate is taken as θ, it is preferred from the standpoint ofimproving a light extraction efficiency that the angle is within a rangeof 100°<θ<160°0, more preferably 132°<θ139° or 147°<θ<154° and mostpreferably at 135° or 152°. The sectional shape of the protruded portionmay take a variety of forms, with its side face being not only flat, butalso curved, e.g. an n-gonal shape (n is an integer of 3 or over),particularly, a triangle, a rectangle, a pentagon, a hexagon and thelike, with or without their apexes being cut off or rounded, a circle,an ellipse and the like, of which a shape having one apex at the highestposition as viewed from the one main surface of the substrate ispreferred, and a triangle or a triangle with its apex being cut off orrounded is more preferred. The recess portion may be in varioussectional forms including, for example, n-gonal shapes (where n is aninteger of 3 or over) such as a triangle, a rectangle, a pentagon, ahexagon and the like, or the just-indicated shapes with their cornersbeing cut off or rounded, a circle, an ellipse and the like. From thestandpoint of improving a light extraction efficiency, the recessportion is preferably in the form of an inverted trapezoid in section.The term “inverted trapezoid” means not only an exact invertedtrapezoid, but also one regarded approximately as an inverted trapezoidherein and whenever it appears hereinafter. In this case, it ispreferred from the standpoint of minimizing the dislocation density ofthe second nitride-based III-V compound semiconductor layer that whenthe depth of the recess portion (equal to the height of the protrudedportion) is taken as d, the width of the base of the recess portiontaken as W_(g), and the angle made between the inclined surface of thefirst nitride-based III-V compound semiconductor layer that istriangular in section and the one main surface of the substrate taken asα, d, W_(g) and α are determined in such a way that 2d≧W_(g) tan α. α isusually constant, so that d and W_(g) are so determined as to establishthe formula. When d is too great, a material gas is not satisfactorilyfed to the inside of the recess portion, thereby impeding the growth ofthe first nitride-based III-V compound semiconductor layer from thebottom of the recess portion. In contrast, when d is too small, thefirst nitride-based III-V compound semiconductor layer grows not only atthe recess portion of the substrate, but also at the protruded portionat opposite sides thereof. To avoid this, d is generally selected withina range of 0.5≦d≦5 μm, preferably within a range of 1.0±0.2 μm. W_(g) isgenerally in the range of 0.5 to 5 μm, and is preferably selected from arange of 2±0.5 μm. The width Wt at the upper surface of the protrudeportion is at zero when the protruded portion is triangular in section.If the protruded portion is trapezoidal in section, this protrudedportion serves as a region used for the lateral growth of the secondnitride-based III-V compound semiconductor layer, for which a longerwidth results in a larger area of a portion where a dislocation densityis reduced. Where the protruded portion is trapezoidal in section, Wt isgenerally at 1 to 1000 μm, and is preferably within a range of 4±2 μm.

The protruded portions or recess portions may extend in a striped shapein one direction of the substrate and when these portions are extendedin striped form in first and second directions at least interesting witheach other, the protruded portions may be arranged in a two-dimensionalpattern of an n-gonal shape (n is an integer of 3 or over),particularly, a triangle, a rectangle, a pentagon, a hexagon or the likeor such n-gonal shape as indicated above, but with their corners beingcut off or rounded, a circle, an ellipse, a dot or the like. For onepreferred example, the protruded portion has a hexagonal planar shape,being arranged two-dimensionally in the form of a honeycomb, and therecess portions are formed so as to surround individual protrudedportions therewith, thereby efficiently obtain lights emitted from theactive layer into 360-degree surrounding of all directions.Alternatively, the recess portion may have a hexagonal planar shape,being arranged two-dimensionally in the form of a honeycomb, and theprotruded portions may be formed so as to surround individual recessportions therewith. Where the recess portions of the substrate areformed in a striped fashion, they may extend, for example, in a <1-100>direction of the first nitride-based III-V compound semiconductor layer,or may extend in <11-20> direction of a sapphire substrate if thesubstrate used is a sapphire substrate. The protruded portion may be,for example, an n-gonal pyramid (n is an integer of 3 or over) such as atriangular pyramid, a square pyramid, a pentagonal pyramid, a hexagonalpyramid or the like, or such an n-gonal pyramid as indicated above butwith their corners being cut off or rounded, a circular cone, anelliptic cone or the like.

The materials for the protruded portion may be of various types and maybe electrically conductive or non-conductive. Mention is made, forexample, dielectric materials such as oxides, nitrides, carbides and thelike and conductors such as of metals, alloys and the like (includingtransparent conductors). Examples of the oxide include silicon oxides(SiO_(x)), titanium oxides (TiO_(x)), tantalum oxides (TaX_(x)), hafniumoxides (HfO₂), zirconium oxides (ZrO_(x)), zinc oxides (ZnO_(x)),aluminium oxides (AlO_(x)), gallium oxides (GaO_(x)), magnesium oxides(MgO_(x)), barium oxides (BaO_(x)), indium oxides (InO_(x)), MgIn₂O₄,fluoride-doped tin oxide (SnO₂:F (FTO)), titanium oxides (SnO_(x)),lithium oxides (LiO_(x)), calcium oxides (CaO_(x)), copper oxides(Cio_(x)), CuAlO₂, SrCu₂O₂, iridium oxides (IrO_(x)), ruthenium oxides(RhO_(x)), Cu^(a)(Al_(x)Ga_(y)In_(z))_(1-a)O₂, CdGeO, InGaZnO, ZnRhO,GaIn₂O₄, LaO, LaCuO and the like. These oxides may be used incombination of two or more or may be used in the form of a stacked film.For nitrides, mention is made, for example, silicon nitrides (SiN_(x)),TiN, WN, CN, BN, LiN, TiON, SiON, CrN, CrNO and the like, and two ormore of these nitrides may be used in combination or may be used in theform of a stacked film. For carbides, mention is made of SiC, HfC, ZrC,WC, TiC, CrC and the like, and two or more of these carbides may be usedin combination or may be used as a stacked film. For metals or alloys,mention is made of B, Al, Ga, In, W, Ni, Co, Pd, Pt, Ag, Hf, Zr, Au, Cu,Ru, Ir, AgNi, AgPd, AuNi, AuPd, AlCu, AlSi, AlSiCu and the like. Two ormore of these metals or alloys may be used in combination or may be usedin the form of a stacked film. For transparent conductors, there may beused ITO (indium-tin composite oxide), IZO (indium-zinc compositeoxide), ZO (zinc oxide), FTO (fluorine-doped tin oxide), tin oxide andthe like. These may be used in combination of two or more or may be usedin the form of a stacked film. Moreover, different types of materials asmentioned above may be used in combination of two or more, or may beused in the form of a layer-stacked film. The protruded portion may beformed of a metal or the like, which is subjected to nitridation,oxidation or carbonization at least on the surface thereof to form anitride, oxide or carbide.

The refractive index of the protruded portion is determined depending onthe design thereof, if necessary. In general, a substrate and anitride-based III-V compound semiconductor layer grown on the substrateare so selected that the refractive indices differ from each other.Typically, the semiconductor layer is selected in type to have arefractive index lower than that of the substrate.

If necessary, the protruded portion may be incorporated with ascattering center for the purposes of scattering light emitted from anactive layer to improve a light extraction efficiency and ensure highoutputting of the resulting light-emitting diode. Such a scatteringcenter used may be silicon fine particles such as, for example, siliconnanocrystals. For the formation of such a protruded portion incorporatedwith silicon fine particles, the protruded portion made of silicon oxideis formed on a substrate and is thermally treated.

From the standpoint of permitting a first nitride-based III-V compoundsemiconductor layer to be grown only at recess portions of a substrate,an amorphous layer may be formed at least on the surface of a protrudedportion. This amorphous layer serves as a growth mask. This makes use ofthe fact that nucleic formation at the stage of growth is unlikely tooccur on an amorphous layer. This amorphous layer may be formed byforming a film on a substrate by one of various film formation methodsor by forming a protruded portion with a metal and oxidizing the surfaceof the protruded portion. The amorphous layer may be, for example, anSiO_(x) film, an SiN_(x) film, an amorphous Si(a-Si) film, an amorphousCrN film or a stacked film of two or more of these films and isordinarily an insulating film. In some case, the protruded portion maybe formed of a first amorphous film, a second amorphous film and a thirdamorphous film formed on a substrate. In this case, for example, thesecond amorphous film may be one, which is selectively etched relativeto the first and third amorphous films.

After lateral growth of the second nitride-based III-V compoundsemiconductor layer, at least a part of an upper portion of theprotruded portion and/or an upper portion of the recess portion of thefirst nitride-based III-V compound semiconductor layer and the secondnitride-based III-V compound semiconductor layer may be removed,followed by lateral growth of a third nitride-based III-V compoundsemiconductor layer on a left portion of the second nitride-based III-Vcompound semiconductor layer and successive growth of an active layerand a fourth nitride-based III-V compound semiconductor layer on thethird nitride-based III-V compound semiconductor layer. Alternatively,after the lateral growth of the second nitride-based III-V compoundsemiconductor layer, at least a part of an upper portion of theprotruded portion and/or an upper portion of the recess portion of thefirst nitride-based III-V compound semiconductor layer and the secondnitride-based III-V compound semiconductor layer may be removed,followed by lateral growth of a fifth nitride-based III-V compoundsemiconductor layer on a left portion of the second nitride-based III-Vcompound semiconductor layer and successive growth, on the fifthnitride-based III-V compound semiconductor layer, of a thirdnitride-based III-V compound semiconductor layer, an active layer and afourth nitride-based III-V compound semiconductor layer.

Further, because threading dislocations concentrate at the associatedportion of the second nitride-based III-V compound semiconductor layerat a portion above the protruded portion, a dislocation propagationinhibiting unit made of an insulator or a space has been formedbeforehand over the protruded portion of a portion serving as theassociated portion. In doing so, a dislocation propagating in the secondnitride-based III-V compound semiconductor layer along a directionparallel to the one main surface of the substrate is inhibited frompropagation by the dislocation propagation inhibiting unit. Eventually,it can be prevented that the dislocation is passed through up to thesurface of the second nitride-based III-V compound semiconductor layerand converted to a threading dislocation.

The third nitride-based III-V compound semiconductor layer is formedthereon with an electrode of the first conduction type in electricconnection therewith. Likewise, the fourth nitride-based III-V compoundsemiconductor layer is formed with an electrode of the second conductiontype in electric connection therewith.

The substrate may be made of various types of materials. For a substratemade of a material different from a nitride-based III-V compoundsemiconductor layer, specific examples include those substrates ofsapphire (including c face, a face, r face and the like and also facesoff therefrom), SiC (including 6H, 4H and 3C), Si, ZnS, ZnO, LiMgO,GaAs, spinnels (MgAl₂O₄, ScAlMgO₄), garnets, CrN (e.g. CrN (111)) andthe like. Preferably, hexagonal substrates or cubic substrates of thesematerials are preferred, of which hexagonal substrates are morepreferred. For a substrate, a substrate made of a nitride-based III-Vcompound semiconductor such as GaN, AlGaInN, AlN, GaInN or the like mayalso be used. Alternatively, a nitride-based III-V compoundsemiconductor layer is grown on a substrate made of a material thatdiffers from a nitride-based III-V compound semiconductor layer, andprotruded portions may be formed on this nitride-based III-V compoundsemiconductor layer.

It will be noted that if a substrate used is one where a layer such as anitride-based III-V compound semiconductor layer is grown on asubstrate, a material for protruded portion is one that is made of amaterial different from a material of a layer provided beneath theprotruded portion.

The substrate may be removed, if required.

The first to fifth nitride-based III-V compound semiconductor layers anda nitride-based III-V compound semiconductor layer serving as an activelayer are most generally made ofAl_(x)B_(y)Ga_(1-x-y-z)In_(z)As_(u)N_(1-u-v)P_(v), in which 0≦x≦1,0≦y≦1, 0≦z≦1, 0≦u≦1 and 0≦v≦1 provided that 0≦x+y+z<1 and 0≦u+v<1, morespecifically, made of Al_(x)B_(y)Ga_(1-x-y-z)In_(z)N, in which 0≦x≦1,0≦y≦1, 0≦z≦1 provided that 0≦x+y+z<1, and typically made ofAl_(x)Ga_(1-x-z)In_(z)N, in which 0≦x≦1 and 0≦z≦1. Specific examplesinclude GaN, InN, AlN, AlGaN, InGaN, AlGaInN and the like. Where B or Cris contained in GaN, for example, an effect of promoting the bending ofdislocation is shown. In this sense, the first to fifth nitride-basedIII-V compound semiconductor layers and a nitride-based III-V compoundsemiconductor layer serving as an active layer may be, respectively,made of BGaN or GaN doped with B such as GaN:B, GaN doped with Cr suchas GaN:Cr, or the like. Especially, the first nitride-based III-Vcompound semiconductor layer, which is initially grown on a recessportion of a substrate, should preferably be one that is made of GaN,In_(x)Ga_(1-x)N (0<x<0.5), Al_(x)Ga_(1-x)N (0<x<0.5) orAl_(x)In_(y)Ga_(1-x-y)N (0<x<0.5 and 0<y<0.2). The first conduction typemay be either an n type or a p type and correspondingly, the secondconduction type may be correspondingly a p type or an n type. For aso-called low-temperature buffer layer that is initially grown on asubstrate, there is usually employed a GaN buffer layer, an AlN bufferlayer, an AlGaN buffer layer or the like. In addition, those bufferlayers indicated above and doped with Cr therein or a CrN buffer layermay also be used.

The thickness of the second nitride-based III-V compound semiconductorlayer is selected as required and typically is several micrometers orbelow, and may be greater depending on the purpose in end use and maybe, for instance, at about several tens of micrometers to 300micrometers.

For a growing method of the first to fifth nitride-based III-V compoundsemiconductor layers and a nitride-based III-V compound semiconductorlayer serving as an active layer, mention is made, for example, ofvarious epitaxial growth methods such as metalorganic chemical vapordeposition (MOCVD), hydride vapor phase epitaxial growth, halide vaporphase epitaxial growth (HVPE), molecular beam epitaxy (MBE) and thelike.

According to a second embodiment of the invention, there is provided alight-emitting diode. The diode includes a substrate having a pluralityof protruded portions on one main surface thereof, in which theprotruded portions are made of a material different in type from that ofthe substrate. The diode further includes a sixth nitride-based III-Vcompound semiconductor layer grown on the substrate without formation ofa space in each recess portion of the substrate, and a thirdnitride-based III-V compound semiconductor layer of a first conductiontype, an active layer and a fourth nitride-based III-V compoundsemiconductor layer of a second conduction type formed on the sixthnitride-based III-V compound semiconductor layer. In the sixthnitride-based III-V compound semiconductor layer, a dislocationoccurring from an interface with a bottom surface of the recess portionin a vertical direction relative to the one main surface arrives at aninclined face of a triangle using the bottom surface of the recessportion as a base or a vicinity thereof and is bent thereat in adirection parallel to the one main surface.

In this second embodiment of the invention, and fourth, sixth andseventh to eleventh embodiments of the invention described hereinafter,the sixth nitride-based III-V compound semiconductor layer is onecorresponding to the first nitride-based III-V compound semiconductorlayer and the second nitride-based III-V compound semiconductor layer inthe first embodiment of the invention.

In the second embodiment and third to thirteenth embodiments of theinvention described hereinafter, those illustrated with respect to thefirst embodiment are true of these embodiments unless otherwise stated.

According to a third embodiment of the invention, there is provided amethod for manufacturing an integrated, light-emitting diode in which aplurality of light-emitting diodes are integrated. The method includes aproviding step, laterally growing step, and successively growing step.The providing step provides a substrate having a plurality of protrudedportions on one main surface thereof, in which each protruded portion ismade of a material different in type from that of the substrate, andgrows a first nitride-based III-V Group compound semiconductor layer oneach recess portion of the substrate through a state of making atriangle in section wherein a bottom surface of the recess portionbecomes a base of the triangle. The laterally growing step grows asecond nitride-based III-V Group compound semiconductor layer on thesubstrate from the first nitride-based III-V Group compoundsemiconductor layer. The successively growing step grows a thirdnitride-based III-V Group compound semiconductor layer of a firstconduction type, an active layer and a fourth nitride-based III-V Groupcompound semiconductor layer of a second conduction type on the secondnitride-based III-V Group compound semiconductor layer.

According to a fourth embodiment of the invention, there is provided anintegrated, light-emitting diode, in which a plurality of light-emittingdiodes are integrated. At least one of the plurality of light-emittingdiodes include a substrate having a plurality of protruded portions onone main surface thereof, in which the protruded portions are made of amaterial different in type from that of the substrate. At least one ofthe plurality of light-emitting diodes further include: a sixthnitride-based III-V compound semiconductor layer grown on the substratewithout formation of a space in each recess portion of the substrate;and a third nitride-based III-V compound semiconductor layer of a firstconduction type, an active layer and a fourth nitride-based III-Vcompound semiconductor layer of a second conduction type formed on thesixth nitride-based III-V compound semiconductor layer. In the sixthnitride-based III-V compound semiconductor layer, a dislocationoccurring from an interface with a bottom surface of the recess portionin a vertical direction relative to the one main surface arrives at aninclined face of a triangle using the bottom surface of the recessportion as a base or a vicinity thereof and is bent thereat in adirection parallel to the one main surface.

In the third and fourth embodiments of the invention, although nolimitation is placed on the field of application of the integratedlight-emitting diodes, typical use includes a light-emitting diodebacklight used for liquid crystal displays, a light-emitting diodeilluminating device, a light-emitting diode display, a light-emittingdiode optical communication device (e.g. a visible light communicationdevice), a light-emitting diode optical apparatus or the like. Thisintegrated light-emitting diode has no limitation with respect to themanner of arrangement and shape of light-emitting diodes. Light-emittingdiodes can be arranged in a two-dimensional array, for example, on asupport (a support substrate), a board or plate used for the purpose ofinterconnections to a variety of devices or inner and outer surfaces ofa casing directly or through another board or plate such as a wiringboard or a heat sink, or can be arranged in a line or plural lines ofstriped light-emitting diodes. The form of the integrated light-emittingdiode may be not only one in which individual light-emitting diodes arefinely, plurally integrated along with circuit patterns by subjecting awafer of semiconductor layers being stacked to batch processing by useof a so-called semiconductor process technique, but also one in which aplurality of light-emitting diodes, each having being already chipped,are finely integrated and arranged on a patterned circuit board. Theselight-emitting diodes may be driven independently or collectively, or agroup of light-emitting diodes within an arbitrarily selected area maybe driven by collective independence (driven in area).

According to a fifth embodiment of the invention, there is provided amethod for growing a nitride-based III-V compound semiconductor layer.The method includes a providing step, and a laterally growing step. Theproviding step provides a substrate having a plurality of protrudedportions on one main surface thereof in which each protruded portion ismade of a material different in type from that of the substrate, andgrows a first nitride-based III-V Group compound semiconductor layer oneach recess portion of the substrate through a state of making atriangle in section in which a bottom surface of the recess portionbecomes a base of the triangle.

The laterally growing step grows a second nitride-based III-V Groupcompound semiconductor layer on the substrate from the firstnitride-based III-V Group compound semiconductor layer.

This growing method of nitride-based III-V Group compound semiconductorlayers may be applicable, aside from the manufacture of a light-emittingdiode or an integrated light-emitting diode, to the manufacture ofvarious types of semiconductor devices.

According to a sixth embodiment of the invention, there is provided asubstrate for growing a nitride-based III-V Group compound semiconductorlayer. The substrate includes: a substrate having a plurality ofprotruded portions on one main surface thereof in which each protrudedportion is made of a material different in type from that of thesubstrate; and a sixth nitride-based III-V Group compound semiconductorlayer grown on the substrate without formation of a space in each recessportion of the substrate. In the sixth nitride-based III-V compoundsemiconductor layer, a dislocation occurring from an interface with abottom surface of the recess portion in a vertical direction relative tothe one main surface arrives at an inclined face of a triangle using thebottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.

According to a seventh embodiment of the invention, there is provided alight source cell unit. The unit includes, on a printed wiring board, aplurality of cells each containing at least one of each of a redlight-emitting diode, a green light-emitting diode and a bluelight-emitting diode. At least one light-emitting diode selected fromthe red light-emitting diode, green light-emitting diode and bluelight-emitting diode mentioned above, which includes a substrate havinga plurality of protruded portions on one main surface thereof in whichthe protruded portions are made of a material different in type fromthat of the substrate. At least one diode selected form the above diodesfurther includes: a sixth nitride-based III-V compound semiconductorlayer grown on the substrate without formation of a space in each recessportion of the substrate; and a third nitride-based III-V compoundsemiconductor layer of a first conduction type, an active layer and afourth nitride-based III-V compound semiconductor layer of a secondconduction type formed on the sixth nitride-based III-V compoundsemiconductor layer. In the sixth nitride-based III-V compoundsemiconductor layer, a dislocation occurring from an interface with abottom surface of the recess portion in a vertical direction relative tothe one main surface arrives at an inclined face of a triangle using thebottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.

According to an eighth embodiment of the invention, there is provided alight-emitting diode backlight, in which a red light-emitting diode, agreen light-emitting diode and a blue light-emitting diode, each beingplural in number, are arranged. At least one light-emitting diodeselected from the red light-emitting diode, green light-emitting diodeand blue light-emitting diode mentioned above, which includes asubstrate having a plurality of protruded portions on one main surfacethereof in which the protruded portions are made of a material differentin type from that of the substrate. At least one diode selected form theabove diodes further includes: a sixth nitride-based III-V compoundsemiconductor layer grown on the substrate without formation of a spacein each recess portion of the substrate; and a third nitride-based III-Vcompound semiconductor layer of a first conduction type, an active layerand a fourth nitride-based III-V compound semiconductor layer of asecond conduction type formed on the sixth nitride-based III-V compoundsemiconductor layer. In the sixth nitride-based III-V compoundsemiconductor layer, a dislocation occurring from an interface with abottom surface of the recess portion in a vertical direction relative tothe one main surface arrives at an inclined face of a triangle using thebottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.

According to a ninth embodiment of the invention, there is provided alight-emitting diode illuminating device, in which a red light-emittingdiode, a green light-emitting diode and a blue light-emitting diode,each being plural in number, are arranged. At least one type oflight-emitting diode selected from the red light-emitting diode, greenlight-emitting diode and blue light-emitting diode mentioned above,which includes a substrate having a plurality of protruded portions onone main surface thereof in which the protruded portions are made of amaterial different in type from that of the substrate. At least onediode selected form the above diodes further includes: a sixthnitride-based III-V compound semiconductor layer grown on the substratewithout formation of a space in each recess portion of the substrate;and a third nitride-based III-V compound semiconductor layer of a firstconduction type, an active layer and a fourth nitride-based III-Vcompound semiconductor layer of a second conduction type formed on thesixth nitride-based III-V compound semiconductor layer. In the sixthnitride-based III-V compound semiconductor layer, a dislocationoccurring from an interface with a bottom surface of the recess portionin a vertical direction relative to the one main surface arrives at aninclined face of a triangle using the bottom surface of the recessportion as a base or a vicinity thereof and is bent thereat in adirection parallel to the one main surface.

A tenth embodiment of the invention, there is provided a light-emittingdiode display, in which a red light-emitting diode, a greenlight-emitting diode and a blue light-emitting diode, each being pluralin number, are arranged. At least one light-emitting diode selected fromthe red light-emitting diode, green light-emitting diode and bluelight-emitting diode mentioned above, which includes a substrate havinga plurality of protruded portions on one main surface thereof in whichthe protruded portions are made of a material different in type fromthat of the substrate. At least one diode selected form the above diodesfurther includes: a sixth nitride-based III-V compound semiconductorlayer grown on the substrate without formation of a space in each recessportion of the substrate; and a third nitride-based III-V compoundsemiconductor layer of a first conduction type, an active layer and afourth nitride-based III-V compound semiconductor layer of a secondconduction type formed on the sixth nitride-based III-V compoundsemiconductor layer. In the sixth nitride-based III-V compoundsemiconductor layer, a dislocation occurring from an interface with abottom surface of the recess portion in a vertical direction relative tothe one main surface arrives at an inclined face of a triangle using thebottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.

In the seventh to tenth embodiments of the invention, the redlight-emitting diode used may be, for example, one that makes use of anAlGaP semiconductor.

According to an eleventh embodiment of the invention, there is providedan electronic device having one or plural light-emitting diodes. Atleast one of the light-emitting diodes include a substrate having aplurality of protruded portions on one main surface thereof in which theprotruded portions are made of a material different in type from that ofthe substrate. At least one of the diodes mentioned above furtherinclude: a sixth nitride-based III-V compound semiconductor layer grownon the substrate without formation of a space in each recess portion ofthe substrate; and a third nitride-based III-V compound semiconductorlayer of a first conduction type, an active layer and a fourthnitride-based III-V compound semiconductor layer of a second conductiontype formed on the sixth nitride-based III-V compound semiconductorlayer. In the sixth nitride-based III-V compound semiconductor layer, adislocation occurring from an interface with a bottom surface of therecess portion in a vertical direction relative to the one main surfacearrives at an inclined face of a triangle using the bottom surface ofthe recess portion as a base or a vicinity thereof and is bent thereatin a direction parallel to the one main surface.

In the eleventh embodiment of the invention, the electronic deviceincludes a light-emitting diode backlight (a backlight for liquidcrystal display and the like), a light-emitting diode illuminatingdevice, a light-emitting diode display and the like, and also aprojector or rear projection television using a light-emitting diode asa light source, a grating light valve (GLV) and the like. In general,limitation is not fundamentally placed on the types of electronicdevices provided that at least one light-emitting diode is containedtherein for the purposes of display, illumination, opticalcommunication, optical transmission and the like, and those devices ofboth a portable type and a desktop type are included within the categoryof the electronic device. Specific examples other than those indicatedabove include cell phones, mobile devices, robotic devices, personalcomputers, in-vehicle devices, various types of home electricappliances, light-emitting diode optical communication apparatus,light-emitting diode optical transmission devices, portable securitydevices such as electronic keys, and the like. The electronic device mayalso include combinations of two or more light-emitting diodes that emitlights of different wavelength regions selected among a far-infraredwavelength region, an infrared wavelength region, a red wavelengthregion, a yellow wavelength region, a green wavelength region, a bluewavelength region, a violet wavelength region, a ultraviolet wavelengthregion. Especially, with a light-emitting diode illuminating device, twoor more light-emitting diodes emitting visible lights of differentwavelength regions which differ from each other and are selected fromamong a red wavelength region, a yellow wavelength region, a greenwavelength region, a blue wavelength region, a violet wavelength regionand the like are combined, and two or more lights emitted from theselight-emitting diodes are mixed to provide natural or white light.Moreover, using, as a light source, a light-emitting diode emittinglight of at least one wavelength region selected from a blue wavelengthregion, a violet wavelength region, an ultraviolet region and the like,the light emitted from this light-emitting diode is irradiated on aphosphor for excitation and the resulting lights are mixed to obtainnatural or white light. Additionally, light-emitting diodes emittingvisible lights of wavelength regions that differ from one another areassembled, for example, into an assembly unit such as a cell unit, aquartet unit, a cluster unit and the like, (strictly speaking, theassembly unit is not defined with respect to the number oflight-emitting diodes contained in one unit of these units and means oneassembly unit in case where a plurality of equal groups, each made of aplurality of light-emitting diodes emitting lights of the samewavelength or different wavelengths, are formed and mounted on a wiringboard, a wiring package, a wiring case wall and the like). Moreparticularly, light-emitting diodes are assembled, for example, into aunit consisting of three light-emitting diodes (e.g. one redlight-emitting diode, one green light-emitting diode and one bluelight-emitting diode), or a unit consisting of four light-emittingdiodes (e.g. one red light-emitting diode, two green light-emittingdiodes and one blue light-emitting diode), and a plurality of such unitsas mentioned above are mounted on a board or case plate in atwo-dimensional array, in a line or in plural lines.

According to a twelfth embodiment of the invention, there is provided amethod for manufacturing an electronic device. The method includes thesteps of: providing a substrate having a plurality of protruded portionson one main surface thereof in which each protruded portion is made of amaterial different in type from that of the substrate and growing afirst layer on each recess portion of the substrate through a state ofmaking a triangle in section using a bottom surface of the recessportion as a base of the triangle; and laterally growing, on thesubstrate, a second layer from the first layer.

According to a thirteenth embodiment of the invention, there is providedan electronic device. The device includes: a substrate having aplurality of protruded portions on one main surface thereof in whicheach protruded portion is made of a material different in type from thatof the substrate; and a third layer grown on the substrate withoutformation of a space in each recess portion of the substrate. In thethird layer, a dislocation occurring from an interface with a bottomsurface of the recess portion in a vertical direction relative to theone main surface arrives at an inclined face of a triangle using thebottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.

In the twelfth and thirteenth embodiments of the invention, the first tothird layers may be made, aside from a nitride-based III-V Groupcompound semiconductor, of other types of semiconductors having awurtzit structure and more generally, a hexagonal crystal structure andalso of various types of semiconductors having other crystal structuressuch as, for example, ZnO, α-ZnS, α-CdS, α-CdSe and the like, along withCrS (111). The semiconductor devices using these types of semiconductorscontain, aside from light-emitting devices including light-emittingdevices such as ordinary light-emitting diodes, intrasubband transition(quantum cascade) light-emitting diodes, ordinary semiconductor lasersand intrasubband transition (quantum cascade) semiconductor lasers,light-receiving devices or sensors such as photodiodes, solar cells, andelectron transit devices typical of which are transistors includingfield effect transistors (FET) such as high electron mobilitytransistors and bipolar transistors such as hetero-junction bipolartransistors (HBT). These devices are formed on the same substrate orchip singly or plurally. These devices may be so arranged as to beindependently driven, if necessary. If light-emitting devices andelectron transit devices are integrated on the same substrate, anoptoelectronic integrated circuit (OEIC) may be arranged. If necessary,optical wiring may be formed. Using light supply by flashing of at leastone light-emitting device (e.g. a light-emitting diode or semiconductorlaser), illumination communication or optical communication can beperformed. In this case, the illumination communication or opticalcommunication may be performed using a plurality of lights of differentwavelength regions.

The electronic devices include, aside from such semiconductor devices asmentioned above (e.g. light-emitting devices, light-receiving devices,electron transit devices and the like), piezoelectric devices,pyroelectric devices, optical devices (such as a second-order harmonicgenerator using a non-linear optical crystal, and the like), dielectricdevices (including ferroelectric devices), superconduction devices andthe like. In this connection, the materials for the first to thirdlayers are such various types of semiconductors as mentioned above forsemiconductor devices, and various types of material such as oxideshaving a hexagonal crystal structure for piezoelectric devices,pyroelectric devices, optical devices, dielectric devices,superconduction devices and the like.

When using those devices including a light-emitting diode orsemiconductor laser as an electronic device, there can be constitutedelectronic devices such as a light-emitting diode backlight, alight-emitting diode illumination device, a light-emitting diode displayand the like, and also a projector or rear projection television, agrating light valve using light-emitting diodes or semiconductor lasersas a light source.

As to the twelfth and thirteenth embodiments of the invention, similarapplications as in the first to eleventh embodiments may be possible.

In the embodiments of the invention so arranged as stated hereinabove,the first nitride-based III-V Group compound semiconductor layercommences to grow from the bottom surface of each recess of thesubstrate, during which the first nitride-based III-V Group compoundsemiconductor layer is grown in a state of making a triangle in sectionusing the bottom surface as a base thereof thereby burying the recesswithout a space. The second nitride-based III-V Group compoundsemiconductor layer is laterally grown from the thus grown, firstnitride-based III-V Group compound semiconductor layer. At this stage,the first nitride-based III-V Group compound semiconductor layerinvolves a dislocation that occurs from the interface with the bottomsurface of the recess of the substrate in a direction vertical to onemain surface of the substrate. This dislocation arrives at the inclinedface of the first nitride-based III-V Group compound semiconductor layeror a vicinity thereof. As the second nitride-based III-V Group compoundsemiconductor layer grows, the dislocation is bent at the arrivedportion in a direction parallel to the one main surface of thesubstrate. At the time when the second nitride-based III-V Groupcompound semiconductor layer grows to a satisfactory thickness, aportion above the dislocation occurring parallel to the one main surfaceof the substrate becomes a region where a dislocation density is verysmall. According to this method, the first to fourth nitride-based III-VGroup compound semiconductor layers can be grown by one cycle ofepitaxial growth. Moreover, the formation, on the substrate, of theprotruded portion made of a material different in type from that of thesubstrate is much simpler than the case that a substrate is directlyprocessed by dry etching to form a patterned indented surface and isgenerally high in processing accuracy.

More generally, this is true of the case where the first nitride-basedIII-V Group compound semiconductor layer is taken as a first layer andthe second nitride-based III-V Group compound semiconductor layer istaken as a second layer.

According to the embodiments of the present invention, because no spaceis formed between each of the first nitride-based III-V Group compoundsemiconductor layer and the second nitride-based III-V Group compoundsemiconductor layer and the substrate, a light extraction efficiency canbe remarkably improved. Moreover, the crystallinity of the secondnitride-based III-V Group compound semiconductor layer is so good thatthe third nitride-based III-V Group compound semiconductor layer, activelayer and fourth nitride-based III-V Group compound semiconductor layer,each formed thereon, can also be remarkably improved with respect to thecrystallinity, thereby obtaining a light-emitting diode having a veryhigh luminous efficiency. In addition, the light-emitting diode can bemanufactured by a single run of epitaxial growth, thus leading to lowmanufacture costs. The surface indentation of substrate is easy with ahigh processing accuracy. Using this light-emitting diode with a highluminous efficiency, there can be obtained various types of electronicdevices such as a high-performance light source cell unit,light-emitting diode backlight, light-emitting diode illuminatingdevice, light-emitting diode display, light-emitting diode opticalcommunication device, optical space transmission device and the like.

More generally, as set out above, similar results can be obtained whenthe first nitride-based III-V Group compound semiconductor layer istaken as a first layer and the second nitride-based III-V Group compoundsemiconductor layer is taken as a second layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1C are, respectively, a sectional view illustrating a methodfor manufacturing a light-emitting diode according to an embodiment ofthe invention;

FIGS. 2A to 2C are, respectively, a sectional view illustrating a methodfor manufacturing a light-emitting diode according to the embodiment ofthe invention;

FIG. 3 is a sectional view illustrating a method for manufacturing alight-emitting diode according to the embodiment of the invention;

FIG. 4 is a plan view showing an example of a planar shape of protrudedportions formed on a substrate in the method of manufacturing alight-emitting diode according to the embodiment of the invention;

FIG. 5 is a plan view showing an example of a planar shape of protrudedportions formed on a substrate in the method of manufacturing alight-emitting diode according to the embodiment of the invention;

FIG. 6 is a plan view showing a light-emitting diode manufactured by themethod of manufacturing a light-emitting diode according to theembodiment of the invention;

FIG. 7 is a sectional view of other structural example of thelight-emitting diode manufactured according to the embodiment of theinvention;

FIG. 8 is a sectional view of other structural example of thelight-emitting diode manufactured according to the embodiment of theinvention;

FIG. 9 is a sectional view of other structural example of thelight-emitting diode manufactured according to the embodiment of theinvention;

FIG. 10 is a sectional view of other structural example of thelight-emitting diode manufactured according to the embodiment of theinvention;

FIG. 11 is a sectional view of other structural example of thelight-emitting diode manufactured according to the embodiment of theinvention;

FIG. 12 is a schematic view showing a substrate used in the method ofmaking a light-emitting diode according to the embodiment of theinvention;

FIG. 13 is a schematic view illustrating how a nitride-based III-V Groupcompound semiconductor layer is grown on a substrate in the method ofmaking a light-emitting diode according to the embodiment of theinvention;

FIG. 14 is a schematic view illustrating the behavior of a dislocationobserved through TEM observation of the nitride-based III-V Groupcompound semiconductor layer grown on a substrate in the method ofmanufacturing a light-emitting diode according to the embodiment of theinvention;

FIG. 15 is a schematic view showing an example of a distribution ofthreading dislocations in the nitride-based III-V Group compoundsemiconductor layer grown on a substrate in the method of manufacturinga light-emitting diode according to the embodiment of the invention;

FIG. 16 is a schematic view showing an example of a distribution ofthreading dislocations in the nitride-based III-V Group compoundsemiconductor layer grown on a substrate in the method of manufacturinga light-emitting diode according to the first embodiment of theinvention;

FIGS. 17A to 17F are, respectively, a schematic view showing how thenitride-based III-V Group compound semiconductor layer is grown on asubstrate in the method of manufacturing a light-emitting diodeaccording to the embodiment of the invention;

FIGS. 18A and 18B are, respectively, a schematic view illustrating thebehavior of a dislocation in the nitride-based III-V Group compoundsemiconductor layer grown on a substrate in the method of manufacturinga light-emitting diode according to the embodiment of the invention;

FIGS. 19A to 19C are, respectively, a photograph showing the initialstate of growth of the nitride-based III-V Group compound semiconductorlayer grown on a substrate in the method of making a light-emittingdevice according to the embodiment of the invention;

FIGS. 20A to 20C are, respectively, a schematic view showing the stateof growth in case where no formation of micronuclei is involved at theinitial stage of growth of the nitride-based III-V Group compoundsemiconductor layer on a substrate in the method of manufacturing alight-emitting diode according to the embodiment of the invention;

FIGS. 21A and 21B are, respectively, a schematic view showing the stateof growth in case where no formation of micronuclei is involved at theinitial stage of growth of the nitride-based III-V Group compoundsemiconductor layer on a substrate in the method of manufacturing alight-emitting diode according to the embodiment of the invention;

FIG. 22 is a schematic view showing the results of ray tracingsimulation of the light-emitting diode manufactured according to theembodiment of the invention;

FIG. 23 is a schematic view illustrating the surface flatness of anactive layer of the light-emitting diode manufactured according to theembodiment of the invention;

FIG. 24 is a schematic view illustrating the surface flatness of anactive layer of the light-emitting diode manufactured according to theembodiment of the invention;

FIGS. 25A and 25B are, respectively, a sectional view illustrating amethod for manufacturing a light-emitting diode according to anotherembodiment of the invention;

FIG. 26 is a plan view showing the light-emitting diode manufactured bya method for manufacturing a light-emitting diode according to a furtherembodiment of the invention;

FIG. 27 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 28 is a plan view showing a light-emitting diode manufactured by amethod for manufacturing a light-emitting diode according to a furtherembodiment of the invention;

FIG. 29 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 30 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 31 is a sectional view illustrating a method for manufacturing alight-emitting diode according to an further embodiment of theinvention;

FIG. 32 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 33 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 34 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 35 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 36 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 37 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 38 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 39 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 40 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 41 is a sectional view illustrating a method for manufacturing alight-emitting diode according to an further embodiment of theinvention;

FIG. 42 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIGS. 43A to 43C are, respectively, a plan view showing an example of aplanar shape of a protruded portion provided below an active layer ofthe light-emitting diode according to the further embodiment of theinvention;

FIGS. 44A to 44C are, respectively, an example of a planar shape of aprotruded portion above the active layer of the light-emitting diodeaccording to the further embodiment of the invention;

FIG. 45 is a sectional view showing a variation of a light-emittingdiode according to the further embodiment of the invention;

FIG. 46 is a sectional view showing another variation of thelight-emitting diode according to the further embodiment of theinvention;

FIG. 47 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIG. 48 is a sectional view illustrating a method for manufacturing alight-emitting diode according to the further embodiment of theinvention;

FIG. 49 is a sectional view illustrating a method for manufacturing alight-emitting diode according to a further embodiment of the invention;

FIGS. 50A to 50C are, respectively, a sectional view illustrating amethod for manufacturing a light-emitting diode according to a furtherembodiment of the invention;

FIG. 51 is a sectional view illustrating a method for manufacturing alight-emitting diode according to the further embodiment of theinvention;

FIG. 52 is a schematic view illustrating the behavior of a dislocationobtained through TEM observation of a nitride-based III-V Group compoundsemiconductor layer grown in a substrate by a method of manufacturing alight-emitting diode according to the further embodiment of theinvention;

FIG. 53 is a diagram showing the results of ray tracing simulation ofthe light-emitting diode manufactured according to the furtherembodiment of the invention;

FIG. 54 is a diagram showing the results of ray tracing simulation ofthe light-emitting diode manufactured according to the furtherembodiment of the invention;

FIG. 55 is a diagram showing the results of ray tracing simulation ofthe light-emitting diode manufactured according to the furtherembodiment of the invention;

FIGS. 56A and 56B are, respectively, a sectional view illustrating amethod for manufacturing a light-emitting diode according to a furtherembodiment of the invention;

FIGS. 57A and 57B are, respectively, a sectional view illustrating amethod for manufacturing a light-emitting diode according to a furtherembodiment of the invention;

FIGS. 58A and 58B are, respectively, a sectional view illustrating amethod for manufacturing a light-emitting diode according to the furtherembodiment of the invention;

FIGS. 59A to 59C are, respectively, a sectional view illustrating amethod for manufacturing a light-emitting diode according to the furtherembodiment of the invention;

FIGS. 60A and 60B are, respectively, a sectional view illustrating amethod for manufacturing a light-emitting diode according to a furtherembodiment of the invention;

FIGS. 61A and 61B are, respectively, a sectional view illustrating amethod for manufacturing a light-emitting diode according to a furtherembodiment of the invention;

FIGS. 62A to 62J are, respectively, a sectional view illustrating amethod for manufacturing a light-emitting diode according to a furtherembodiment of the invention;

FIGS. 63A to 63C are, respectively, a sectional view illustrating amethod for manufacturing a light-emitting diode backlight according to afurther embodiment of the invention;

FIG. 64 is a perspective view illustrating a method for manufacturing alight-emitting diode backlight according to the further embodiment ofthe invention;

FIG. 65 is a perspective view illustrating a method for manufacturing alight-emitting diode backlight according to the further embodiment ofthe invention;

FIG. 66 is a perspective view illustrating a method for manufacturing alight-emitting diode backlight according to a further embodiment of theinvention;

FIG. 67 is a perspective view showing an integrated light-emitting diodemanufactured according to a further embodiment of the invention;

FIG. 68 is a sectional view showing how the integrated light-emittingdiode, which is manufactured according to the thirty-first embodiment ofthe invention, is mounted on a submount;

FIGS. 69A and 69B are, respectively, a plan view showing a light sourcecell unit and an enlarged view of the cell of the light source cell unitaccording to a further embodiment of the invention;

FIG. 70 is a plan view showing a specific example of a light source cellunit according to the further embodiment of the invention;

FIG. 71 is a plan view showing another example of a light source cellunit according to the further embodiment of the invention;

FIG. 72 is a plan view showing a further example of a light source cellunit according to the further embodiment of the invention;

FIG. 73 is a sectional view showing another example of a light-emittingdiode;

FIG. 74 is a sectional view showing a further example of alight-emitting diode;

FIG. 75 is a sectional view showing a still further example of alight-emitting diode;

FIG. 76 is a sectional view showing a yet further example of alight-emitting diode;

FIGS. 77A to 77C are, respectively, a sectional view illustrating amethod of growing a GaN semiconductor layer on a conventional indentedsubstrate;

FIG. 78 is a sectional view illustrating a problem involved in a methodof growing a conventional GaN semiconductor layer shown in FIGS. 77A to77C;

FIGS. 79A to 79D are, respectively, a sectional view illustrating amethod of growing a GaN semiconductor substrate on a conventional,indented substrate;

FIGS. 80A to 80F are, respectively, a sectional view illustrating amethod of growing a GaN semiconductor layer on another type of indentedsubstrate; and

FIGS. 81A and 81B are, respectively, a schematic view showing maincrystal faces and crystal orientations of sapphire.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The embodiments of the invention are described with reference to theaccompanying drawings. It will be noted that like reference numeralsindicate like or corresponding parts, members or portions throughout thedrawings illustrating the embodiments of the invention.

In FIGS. 1A to 3, a method of manufacturing a light-emitting diodeaccording to a first embodiment of the invention is shown in sequence.This light-emitting diode makes use of a nitride-based III-V Groupcompound semiconductor such as GaN.

In the first embodiment, as shown in FIG. 1A, a substrate 11 having aflat main surface and made of a material different from a nitride-basedIII-V compound semiconductor is provided. Protruded portions 12 having aisosceles triangle are formed on the substrate 11 in a given planarpattern at intervals. Thus, a recess 13 having an inverted trapezoid insection is formed between adjacent protruded portions 2. The substrate11 may be, for example, one that has been stated hereinbefore andincludes, for example, a sapphire substrate, with its main face being,for example, a c face. The planar shape or form of the protrudedportions 12 and recess portions 13 may be one selected from many planarshapes set out hereinbefore. For instance, the planar shape may be oneof which the protruded portion 12 and recess portion 13 both extend inone direction to provide a striped pattern as shown in FIG. 4, or one ofwhich each protruded portion 12 has a hexagonal planar shape and isarranged two-dimensionally in the form of a honeycomb. Typically, it isso arranged that a direction of a dotted line in FIG. 4 (i.e. adirection intersecting with the stripe) becomes parallel to the a axisof a nitride-based III-V Group compound semiconductor layer 15 describedhereinafter, or a direction of the dotted line in FIG. 5 (i.e. adirection connecting the most adjacent protruded portions 12) becomesparallel to the m axis of a nitride-based III-V Group compoundsemiconductor layer 15 described hereinafter. For instance, where thesubstrate 11 is a sapphire substrate, the direction of extension of theprotruded portion 12 and recess portion 13 in striped form in FIG. 4 isat the <1-100> direction of the sapphire substrate and the direction ofextension of the recess portion in FIG. 5 is likewise at the <1-100>direction of the sapphire substrate. The extension directions may be atthe <11-20> direction of the sapphire substrate. The materials for theprotruded portions may be those described hereinbefore. In view of theease in processing, preferred ones include, fore example, SiO₂, SiN,CrN, SiON, CrON and the like.

In order to form the protruded portions 12 having an isosceles trianglein section on the substrate 11, any known techniques may be used. Forinstance, a film serving as a material for the protruded portion 12(e.g. an SiO₂ film) is formed the entire surface of the substrate 11 bya CVD method, a vacuum deposition method, a sputtering method or thelike. Next, a resist pattern of a given form is formed on the film bylithography. Thereafter the film is etched through the mask of theresist pattern by a reactive ion etching (RIE) method or the like underconditions where taper etching is performed, thereby forming a protrudedportion 12 of an isosceles triangle in section.

Next, the substrate 11 and the protruded portions 12 are cleaned on thesurfaces thereof by subjecting them to thermal cleaning, and thesubstrate 11 is grown thereon, for example, with a GaN buffer layer, anAlN buffer layer, a CrN buffer layer, a Cr-dope GaN buffer layer or aCr-doped AlN buffer layer (not shown) by a known method at a growthtemperature, for example, of about 550° C. Subsequently, a nitride-basedIII-V Group compound semiconductor layer is epitaxially grown, forexample, by a MOCVD method. This nitride-based III-V Group compoundsemiconductor layer is made, for example, of GaN. At this stage, asshown in FIG. 1B, the growth starts from the bottom surface of therecess 13 to form a plurality of micronuclei 14 made of thenitride-based III-V Group compound semiconductor. As shown in FIG. 1C,the nitride-based III-V Group compound semiconductor layer 15 is grownthrough a step of growth and combination of the micronuclei 14 in such away as to make an isosceles triangle in section which has the bottomsurface of the recess 13 as a base and facets inclined relative to themain surface of the substrate 11 as an oblique side. In this instance,the height of the nitride-based III-V Group compound semiconductor layer15 with an isosceles triangle in section is larger than the height ofthe protruded portion. For instance, the extension direction of thenitride-based III-V Group compound semiconductor layer 15 is at a<1-100> direction thereof, with the facets of the inclined surface beinga (1-101) face. The nitride-based III-V Group compound semiconductorlayer 15 may be either undoped or doped with an n-type impurity orp-type impurity. The growth conditions of the nitride-based III-V Groupcompound semiconductor layer 15 will be described hereinlater. Theextension direction of the nitride-based III-V Group compoundsemiconductor layer 15 may be at a <11-20> direction thereof.

Subsequently, when the growth of the nitride-based III-V Group compoundsemiconductor layer 15 is carried out while keeping the facetorientation of the inclined surface, the opposite ends of thenitride-based III-V Group compound semiconductor layer 15 grow to anextent of the lower portion of the side face of the protruded portion 12to provide a state of making a pentagon in section as is particularlyshown in FIG. 2A.

Next, the growth is continued while setting the growth conditions insuch a way that lateral growth becomes predominant, whereupon as shownin FIG. 2B, the nitride-based III-V Group compound semiconductor layer15 laterally grows as indicated by the arrow and spreads over theprotruded portion 12 in a state of making a hexagon in section. In FIG.2B, the dotted line indicates a growth interface during the course ofthe growth herein and whenever it appears hereinafter.

As the lateral growth is further continued, the nitride-based III-VGroup compound semiconductor layer 15 grows while increasing itsthickness as shown in FIG. 2C and finally the nitride-based III-V Groupcompound semiconductor layers 15 grown from adjacent recess portions 13contact with each other and combine together.

Subsequently, as shown in FIG. 2C, the nitride-based III-V Groupcompound semiconductor layer 15 is further laterally grown until thesurface thereof becomes a flat surface that is parallel to the mainsurface of the substrate 11. The thus grown nitride-based III-V Groupcompound semiconductor layer 15 becomes very low in dislocation densityat a portion over the recess portion 13.

It will be noted that in some case, it is possible to change from thestate shown in FIG. 1C directly to the state of FIG. 2B without the stepshown in FIG. 2A.

Next, as shown in FIG. 3, the nitride-based III-V Group compoundsemiconductor layer 15 is formed thereon successively with an n-typenitride-based III-V Group compound semiconductor layer 16, an activelayer 17 using a nitride-based III-V Group compound semiconductor, and ap-type nitride-based III-V Group compound semiconductor layer 18, forexample, by a MOCVD method. In this case, the nitride-based III-V Groupcompound semiconductor layer 15 is of an n-type.

Next, the substrate 11 on which the nitride-based III-V Group compoundsemiconductor layers have been grown is removed from the MOCVDapparatus.

Thereafter, a p-side electrode 19 is formed on the p-type nitride-basedIII-V Group compound semiconductor layer 18. The material of the p-sideelectrode 19 should preferably be, for example, an ohmic metal havinghigh reflectivity.

Thereafter, for the purpose of activating the p-type impurity in thep-type nitride-based III-V Group compound semiconductor layer 18,thermal treatment is carried out in an atmosphere, for example, of amixed gas of N₂ and O₂ (having a composition, for example, of 99% of N₂and 1% of O₂) at a temperature of 550 to 750° C. (e.g. 650° C.) or 580to 620° C. (e.g. 600° C.). When O₂ is mixed with N₂, the activationbecomes likely to occur. Alternatively, a nitrogen halide (NF₃, NCl₃ orthe like) serving as a starting material for F or Cl that has highelectronegativity like O and N may be mixed with an atmosphere of N₂ ora mixed gas of N₂ and O₂. The thermal treatment time is, for example, atfive minutes to two hours, preferably 40 minutes to two hours and morepreferably about 10 to 60 minutes. The reason why the thermal treatmenttemperature is relatively low is to prevent the active layer 16 fromdegrading during the thermal treatment. It will be noted that thethermal treatment may be effected after the epitaxial growth of thep-type nitride-based III-V Group compound semiconductor layer 18, butprior to the formation of the p-side electrode 19.

Next, the n-type nitride-based III-V Group compound semiconductor layer16, active layer 17 and p-type nitride-based III-V Group compoundsemiconductor layer 18 are patterned in a desired form, for example, bya RIE method, a powder blasting method, a sand blasting method or thelike to form a mesa portion 20.

Next, an n-side electrode 21 is formed on the nitride-based III-V Groupcompound semiconductor layer 15 at a portion adjacent to the mesaportion 20.

If necessary, the substrate on which such a light-emitting diodestructure has been formed may be polished or lapped from the backsidethereof to decrease the thickness thereof, followed by scribing of thesubstrate 11 to form a bar. Thereafter, the bar is scribed to provide achip.

In this way, an intended light-emitting diode is made.

An instance of planar shapes of the p-side electrode 19 and the n-sideelectrode 21 is shown in FIG. 6 in the case where the protruded portionhas a striped form extending in one direction.

The starting materials for the growth of the nitride-based III-V Groupcompound semiconductor layer include triethyl gallium ((C₂H₅)₃Ga, TEG)or trimethyl gallium ((CH₃)₃Ga, TMG) for a starting material for Ga,trimethyl aluminium ((CH₃)₃Al, TMA) for a starting material for Al,triethyl indium ((C₂H₅)₃In, TMI) or trimethyl indium ((CH₃)₃In, TMI) fora starting material for In, and ammonia for a starting material for N.Dopants used include an n-type dopant such as, for example, silane(SiH₄) or disilane (Si₂H₆) and a p-type dopant such as, for example,bis(methylcyclopentadienyl)magnesium ((CH₃C₅H₄)₂Mg),bis(ethylcyclopentadienyl)magnesium ((C₂H₆C₅H₄)₂Mg), orbis(cyclopentadienyl)magnesium ((C₅H₄)₂Mg). For a carrier gas atmosphereused upon growth of the nitride-based III-V Group compound semiconductorlayers, H₂ gas is used, for example.

A specific structural example of the light-emitting diode is nowdescribed. More particularly, for example, the nitride-based III-V Groupcompound semiconductor layer 15 is an n-type GaN layer, thenitride-based III-V Group compound semiconductor layer 16 isconstituted, in order from below, of an n-type GaInN layer, an n-typeGaN layer and an n-type GaInN layer, and the p-type nitride-based III-VGroup compound semiconductor layer 18 is made, in order from below, of ap-type GaInN layer, a p-type AlInN layer, a p-type GaN layer and ap-type GaInN layer. The active layer 17 has, for example, a GaInN-basedmultiple quantum well (MQW) structure (e.g. an alternate lamination of aGaInN quantum well layer and a GaN barrier layer). The In composition inthe active layer 17 is selected depending on the emission wavelength ofa light-emitting diode. For instance, the In content is up to 11% for anemission wavelength of 405 nm, up to 18% for 450 nm, and up to 24% for520 nm. The material for the p-side electrode 19 includes, for example,Ag or Pd/Ag, or if necessary, barrier metals made of Ti, W, Cr, WN, CrNor the like in addition to the first-mentioned material. The n-sideelectrode 21 used may be, for example, one having a Ti/Pt/Au structure.

In the thus obtained light-emitting diode shown in FIG. 3, a forwardvoltage is applied between the p-side electrode 19 and the n-sideelectrode 21 for passage of a current to effect light emission, and theresulting light is extracted through the substrate 11 to outside. Properselection of the In composition in the active layer 17 results in red toviolet light emission, particularly, blue light emission, green lightemission or red light emission. In this case, a light, which is directedto the substrate 11 among lights generated from the active layer 17, isrefracted at the interface between the substrate 11 and thenitride-based III-V Group compound semiconductor layer 15 at the recessportion 13 and goes out to outside through the substrate 11. A light,directed to the p-side electrode 19 among the lights generated in theactive layer 17, is reflected at the p-side electrode 19 and directed tothe substrate 11, and goes out to outside through the substrate 11.

The structure of the light-emitting diode is not limited to that shownin FIG. 3 and may be, for example, those structures shown in FIGS. 7 to11. With the structure shown in FIG. 7, the n-type nitride-based III-VGroup compound semiconductor layer 16, active layer 17 and p-typenitride-based III-V Group compound semiconductor layer 18 are sopatterned as to leave the central portions thereof, thereby forming themesa portion 20. The p-side electrode 19 is formed on the p-typenitride-based III-V Group compound semiconductor layer 18 of the mesaportion 20, and the n-side electrode 21 is formed on the n-typenitride-based III-V Group compound semiconductor layer 15 at theopposite sides of the mesa portion 20. In the instance shown in FIG. 8,the n-type nitride-based III-V Group compound semiconductor layer 16,active layer 17 and p-type nitride-based III-V Group compoundsemiconductor layer 18 are, respectively, formed thereinto with arecessed portion G, for example, in the form of a slit groove with asmall width or a columnar hole (e.g. the bottom surface of the columnbeing circular, anglewise, point-like or the like) at the centralportions thereof. A striped or point-like n-side electrode 21 is formedon the n-type nitride-based III-V Group compound semiconductor layer 15at the bottom of the recessed portion G. Because the contact resistanceof the n-side electrode 21 with the n-type nitride-based III-V Groupcompound semiconductor layer is low, such a small contact area of then-side electrode 21 ensures a good ohmic contact characteristic, therebypermitting an electric current to be relatively readily prevailedthroughout the n-type nitride-based III-V Group compound semiconductorlayer 15 from the contact point (or contact face). The p-side electrode19 is formed to surround the n-side electrode 21. Alternatively, then-side electrode 21 may be formed to surround the p-side electrode 19.With an instance shown in FIG. 9, the n-type nitride-based III-V Groupcompound semiconductor layer 16, active layer 17 and p-typenitride-based III-V Group compound semiconductor layer 18 are,respectively, formed thereinto with a recessed portion G made of a slitgroove of a small width or a columnar hole (e.g. the bottom surface ofthe column being circular, anglewise, point-like or the like) (when therecessed portion G is in the form of a columnar hole, a plurality ofsuch recessed portions G are two-dimensionally arranged in the form of ahoneycomb, a grid or spots on a dice (i.e. in the form of holes that arerelatively distant from one another like holes indicating spots on adice). In this case, an n-side electrode 21 is formed on the n-typenitride-based III-V Group compound semiconductor layer 15 at the bottomof the respective recessed portion G. If, for example, the recessedportions G are each in the form of such a columnar hole as mentionedabove and are two-dimensionally formed in an arrangement of a honeycomb,a grid or spots on a dice, the p-side electrode 19 is formed to surroundthe n-side electrode 21. Alternatively, the n-side electrode is formedto surround the p-side electrode. With an instance shown in FIG. 10, then-type nitride-based III-V Group compound semiconductor layer 16, activelayer 17 and p-type nitride-based III-V Group compound semiconductorlayer 18 are, respectively, formed thereinto with a recessed portion Gin the form of a slit groove of a small width or a columnar hole (e.g.the bottom surface of the column being circular, anglewise orpoint-like) (when the recessed portion is in the form of a columnarhole, a plurality of such recessed portions G are two-dimensionallyformed in an arrangement of a honeycomb, a grid or spots on a dice). Then-side electrode 21 is formed on the n-type nitride-based III-V Groupcompound semiconductor layer 15 at the bottom of each recessed portionG. For example, where the recessed portions G are each in the form of acolumnar hole and are two-dimensionally formed in an arrangement of ahoneycomb, a grid or spots on a dice, the p-side electrode 19 is formedto surround the n-side electrode 21 or the n-side electrode 21 is formedto surround the p-side electrode 19. With an instance shown in FIG. 11,the n-type nitride-based III-V Group compound semiconductor layer 16,active layer 17 and p-type nitride-based III-V Group compoundsemiconductor layer 18 are, respectively, formed thereinto with arecessed portion G in the form of a slit groove of a small width or acolumnar hole (e.g. the bottom surface of the column being circular,anglewise, point-like or the like) (when the recessed portion G is inthe form of a columnar hole, a plurality of the recessed portions G areformed in an arrangement of a honeycomb, a grid or spots on a dice).Each recessed portion G is formed with an insulating film I made of aSiO₂ film on a side wall thereof. An n-side electrode 21 is formed onthe n-type nitride-based III-V Group compound semiconductor layer 15 atthe bottom of each recessed portion in a condition of electricinsulation with the n-type nitride-based III-V Group compoundsemiconductor layer 16, active layer 17 and p-type nitride-based III-VGroup compound semiconductor layer 18 by means of the insulating film Ito an extent of burying the recessed portion H therewith. For instance,where the recessed portions G are in the form of such a columnar hole asmentioned above and are two-dimensionally formed in an arrangement of ahoneycomb, a grid or spots on a dice, the p-side electrode 19 is formedto surround the n-side electrode 21, or the n-side electrode 21 isformed to surround the p-side electrode 19. In the instances shown inFIGS. 7 to 11, particularly in FIG. 11, the wiring for the p-sideelectrode 19 and n-side electrode 21 is readily realized by use of aconventional double-layer wiring technique.

The structures of the light-emitting diodes illustrated hereinbefore aremost suited, especially, as a structure for a flip-chip (FC)light-emitting diode in which a optically transparent substrate is usedas the substrate 11 and light emission is effected from the entirety ofa back side of the optically transparent substrate. For one ofperformance indices of the light-emitting diode, mention is made of(luminous efficiency)/(total chip area). For improving the index of this(luminous efficiency)/(total chip area), it is desirable to reduce thenumber of the recessed portions G, in which the active layer 17 has beenremoved, to an extent as small as possible or to reduce the bottomsurface area of the recessed portion G to an extent as small aspossible. Hence, taking the mobility of carriers (electrons) in then-type nitride-based III-V Group compound semiconductor layer 15 intoaccount, the total area of the n-side electrode 21 formed at the bottomof the recessed portion G is preferably at several tens of percent, morepreferably several percent or below, and most preferably 1% or below, ofthe n-side electrode 21 of a columnar form relative to the total chiparea, thereby ensuring satisfactory prevalence of an electric currentthroughout the active layer 17.

In the first embodiment, in order to minimize the threading dislocationdensity in the nitride-based III-V Group compound semiconductor layer15, the width W_(g) of the bottom surface of the recess portion 13, thedepth d of the recess portion 13, i.e. the height of the of theprotruded portion 12, and the angle α established between the inclinedface of the nitride-based III-V Group compound semiconductor layer 15 ina state shown in FIG. 1C and the main surface of the substrate 11 are sodetermined as to satisfy the following equation (see FIG. 12)2d≧W _(g) tan α

For example, d≧1.75 μm for W_(g)=2.1 μm and α=59°, d≧1.66 μm for W_(g)=2μm and α=59°, d≧1.245 μm for W_(g)=1.5 μm and α=59°, and d≧0.966 μm forW_(g)=1.2 μm and α=59°. In either case, it is preferred that d≦5 μm.

For the growth of the nitride-based III-V Group compound semiconductorlayer 15 in the steps shown in FIGS. 1B, 1C and 2A, it is preferred thatthe V/III ratio of the starting materials for growth is set at arelatively high value and the growth temperature is set at a relativelylow level. More particularly, where the growth of the nitride-basedIII-V Group compound semiconductor layer 15 is carried out under apressure of 1 atm, it is preferred that the V/III ratio of the startingmaterials is, for example, within a range of 13000±2000 and the growthtemperature is set, for example, within a range of 1100±50° C. Withrespect to the V/III ratio of the starting materials, where the growthof the nitride-based III-V Group compound semiconductor layer 15 iscarried out under pressure conditions of x atms, it is preferred to setthe V/III ratio at a level obtained by the ratio times a variation ofpressure squared in view of the Bernoulli's principle defining therelation between the flow rate and the pressure, particularly,substantially at (13000±2000)×x². For instance, where the growth isperformed at 0.92 atm (700 Torr), the V/III ratio of the startingmaterials is preferably set within a range of 11000±1700 (e.g. at10530). x is preferably at 0.01 to 2 atms. With respect to the growthtemperature, where the growth is carried out under pressure conditionsof not higher than 1 atm, setting at a lower temperature is preferred soas to suppress the lateral growth of the nitride-based III-V Groupcompound semiconductor layer 15 and allow easy selective growth of thenitride-based III-V Group compound semiconductor layer 15 in the recessportion 13. For instance, when the growth is effected at 0.92 atms (700Torr), it is preferred to set the growth temperature within a range of1050±50° C. (e.g. at 1050° C.). In this way, the nitride-based III-VGroup compound semiconductor layer 15 grows as is particularly shown inFIGS. 1B, 1C and 2A. Upon the growth, the nitride-based III-V Groupcompound semiconductor layer 15 does not start to grow from on theprotruded portion 12. The growth rate is generally at 0.5 to 5 μm/hour,preferably about 3.0 μm/hour. Where the nitride-based III-V Groupcompound semiconductor layer 15 is made, for example, of a GaN layer,the flow rate of the starting material gas is, for example, at 20 SCCMfor TMG and 20 SLM for NH₃. On the other hand, the growth (lateralgrowth) of the nitride-based III-V Group compound semiconductor layer 15in the steps shown in FIGS. 2B and 2C is effected at a relatively lowV/III ratio of the starting materials and at a relatively high growthtemperature. More particularly, where the growth of the nitride-basedIII-V Group compound semiconductor layer 15 is carried out underpressure conditions of 1 atm, the V/III ratio of the starting materialsis set, for example, within a range of 5000±2000 and the growthtemperature is set, for example, within a range of 1200±50° C. Withrespect to the V/III ratio of the starting materials, where the growthof the nitride-based III-V Group compound semiconductor layer 15 iscarried out under pressure conditions of x atms, it is preferred to setthe V/III ratio at a level obtained by the ratio times a variation ofpressure squared in view of the Bernoulli's principle defining therelation between the flow rate and the pressure, particularly,substantially at (5000±2000)×x². For instance, where the growth isperformed at 0.92 atm (700 Torr), the V/III ratio of the startingmaterials is preferably set within a range of 4200±1700 (e.g. at 4232).With respect to the growth temperature, where the growth is carried outunder pressure conditions of not higher than 1 atm, setting at a lowertemperature is preferred so as to suppress the surface roughness of thenitride-based III-V Group compound semiconductor layer 15 and allow goodlateral growth. For example, where the growth is effected at 0.92 atm(700 Torr), it is preferred to set the growth temperature within a rangeof 1150±50° C. (e.g. 1110° C.). Where the nitride-based III-V Groupcompound semiconductor layer 15 is made, for example, of a GaN layer,the flow rates of the starting material gases are, for example, at 40SCCM for TMG and 20 SLM for NH₃. In this way, the nitride-based III-VGroup compound semiconductor layer 15 is formed by lateral growth asshown in FIGS. 2B and 2C.

FIG. 13 schematically shows how the starting material gases flow anddiffuse over the substrate at the stage of growth of a GaN layerindicated as an example of the nitride-based III-V Group compoundsemiconductor layer 15. The most important point in this growth residesin that at the initial stage of the growth, GaN does not grow at theprotruded portion 12 of the substrate 11 and the growth of GaN starts atthe recess portion 12. It will be noted that although the protrudedportion 12 is shown in the form of a triangle in section in FIG. 13, noGaN grows on the protruded portion 12 even if the section is in the formof a trapezoid. In general, when considering the case where TMG is usedas a starting material for Ga and NH₃ is used as a starting material forN, GaN grows by direction reaction between NH₃ and Ga as represented bythe following reaction formulasGa(CH₃)₃ (gas)+ 3/2H₂ (gas)→Ga (gas)+3CH₄ (gas)NH₃ (gas)→(1−α)NH₃ (gas)+α/2N₂ (gas)+3α/2H₂ (gas)Ga (gas)+NH₃ (gas)=GaN (solid)+ 3/2H₂ (gas)

Although H₂ gas generates, this H₂ gas reversely acts on the crystalgrowth, or have etching action. In the steps shown in FIGS. 1B, 1C and2A, growth on the protruded portion 12 is suppressed using theconditions which are not used for the growth of GaN on a conventionalflat substrate, i.e. using the conditions of enhancing etching actionand also conditions where growth is unlikely to occur (by increasing theV/III ratio). On the other hand, inside of the recess portion 13,crystallization occurs using the conditions of suppressed etchingaction. Traditionally, in order to improve the flatness of a growncrystal surface, the growth has been carried out under conditions wherea degree of lateral growth increases (using a higher temperature). Inthe first embodiment, the growth is performed at a temperature lowerthan in the traditional case (e.g. at 1050±50° C.) for the purposes ofbending threading dislocations toward a direction parallel to the mainsurface of the substrate to reduce the number thereof and burying therecess portion 13 with the nitride-based III-V Group compoundsemiconductor layer 15 at an early stage.

FIG. 14 schematically shows the results of a study on a crystal defectdistribution in the nitride-based III-V Group compound semiconductorlayer 15 determined by a transmission electron microscope (TEM). In FIG.14, reference numeral 22 indicates a threading dislocation. As will beseen from FIG. 14, although the dislocation density becomes high in thevicinity of the center of the protruded portion 12, i.e. at a portion ofcombination between the nitride-based III-V Group compound semiconductorlayers 15 grown from adjacent recess portions 13, the dislocationdensity becomes low at the other portions including a portion above therecess portion 13. For instance, where the depth of the recess portionis at d=1 μm and the width of the bottom surface is at W_(g)=2 μm, thedislocation density at this low dislocation density is at 6×10⁷/cm²,which is reduced by one to two orders of magnitude over the case wherethe surface-protruded substrate 11 is not used. In addition, it will beseen that no dislocation occurs in a direction vertical to the sidewalls of the recess portion 13.

In FIG. 14, the average thickness of a region of the nitride-based III-VGroup compound semiconductor layer 15 in contact with the substrate 11at the recess portion 13 where the dislocation density is high andcrystallinity is poor is about 1.5 times the average thickness of aregion of the nitride-based III-V Group compound semiconductor layer 15in contact with the substrate at the protruded portion 12 where thedislocation density is high and crystallinity is poor. This results fromthe lateral growth of the nitride-based III-V Group compoundsemiconductor layer 15 on the protruded portion 12.

FIG. 15 shows a distribution of threading dislocations 22 in case wherethe protruded portion 12 has such a planar shape as shown in FIG. 4.FIG. 16 shows a distribution of threading dislocations 22 in case wherethe protruded portion 12 has such a planar shape as shown in FIG. 5.

Next, how the nitride-based III-V Group compound semiconductor layer 15grows from an initial stage of growth and how dislocations propagate areillustrated with reference to FIGS. 17A to FIG. 17F.

When the growth is initiated, a plurality of micronuclei 14 made of anitride-based III-V Group compound semiconductor are produced at thebottom surface of the recess 13 as shown in FIG. 17A. In thesemicronuclei 14, a dislocation (indicated by dotted line) propagates fromthe interface with the substrate 11 in a vertical direction and goesthrough from the side faces of the micronucleus 14. When the growth iscontinued, a nitride-based III-V Group compound semiconductor layer 15grows through the steps of growth and combination of the micronuclei 14as shown in FIGS. 17B and 17C. During the course of the growth andcombination of the micronuclei 14, bending of dislocations in directionsparallel to the main surface of the substrate 11 takes place, so thatdislocations going through to the upper portion are reduced in number.As the growth is further continued, as shown in FIG. 17D, thenitride-based III-V Group compound semiconductor layer 15 is formed asan isosceles triangle in section in which the bottom surface of therecess portion 13 is a base of the triangle. At this stage, thedislocations going through from the nitride-based III-V Group compoundsemiconductor layer 15 to the upper portion are significantly reduced innumber. Next, as shown in FIG. 17E, the nitride-based III-V Groupcompound semiconductor layer 15 is laterally grown. In this step,dislocations that go through to the side faces of the nitride-basedIII-V Group compound semiconductor layer 15 having an isosceles trianglein section in which the bottom surface of the recess portion 13 isprovided as a base behave such that some dislocations positioned at alevel lower than the protruded portion 12 continuedly extend to the sideface of the protruded portion 12 in parallel to the main surface of thesubstrate 11 and disappear, and some dislocations positioned at a levelhigher than the protruded portion 12 extend parallel to the main surfaceof the substrate 11 and go through to the side face of the laterallygrown nitride-based III-V Group compound semiconductor layer 15. Whenthe lateral growth of the nitride-based III-V Group compoundsemiconductor layer 15 is further continued, nitride-based III-V Groupcompound semiconductor layers 15 grown from opposite sides of theprotruded portion 12 combine together at the top of the protrudedportion 12 and finally, the nitride-based III-V Group compoundsemiconductor layer 15 becomes a flat surface parallel to the mainsurface of the substrate 11 as shown in FIG. 17F. The dislocation in thenitride-based III-V Group compound semiconductor layer 15 is bentupwardly (in a direction vertical to the main surface of the substrate11) when the layers are combined together over the protruded portion 12.

With reference to FIGS. 18A and 18B, the behavior of dislocations in thecourse of from the formation of the micronuclei 14 to after the lateralgrowth of the nitride-based III-V Group compound semiconductor layer 15is illustrated again. As shown in FIGS. 18A and 18B, dislocationsoccurring from the interface with the substrate 11 in the course of theformation, growth and combination of the micronuclei 14 are repeatedlybent in horizontal directions and bundled (dislocation (1)). Thedislocations bent in horizontal directions extend to the side face ofthe protruded portion 12 and disappear (dislocation (2)). Moreover, adislocation occurring from the interface with the substrate 11 is bentonce and goes through to the surface of the nitride-based III-V Groupcompound semiconductor layer 15 (dislocation (3)). By the bundling ofthe dislocations and the disappearance after extension of thedislocations bent in horizontal directions to the side faces of theprotruded portion 12, there can be obtained a nitride-based III-V Groupcompound semiconductor layer 15 which is reduced in number of threadingdislocations over the case where no micronuclei 14 are formed.

The TEM photographs of sections in the state where the micronuclei 14are formed at the bottom surface of the protruded portion 13 as shown inFIG. 17A are shown in FIGS. 19A to 19C. FIGS. 19B ad 19C are,respectively, an enlarged sectional TEM photograph of a portionsurrounded by an oval in FIG. 19A. From FIGS. 19A to 19C, the formationof the micronuclei 14 at the initial stage of growth will be well seen.

Next, how the behavior of dislocations occurring in the nitride-basedIII-V Group compound semiconductor layer 15 differ between the casewhere micronuclei 14 are formed at an initial stage of growth and thecase where no micronuclei 14 are formed is illustrated.

FIGS. 20A to 20C, respectively, show states corresponding to FIGS. 17Dto 17F in the case where no micronuclei 14 occur at an initial stage ofgrowth of the nitride-based III-V Group compound semiconductor layer 15.As shown in FIG. 20A, where no micronuclei 14 occur at the initial stageof growth, only dislocations extending upwardly from the interface withthe bottom surface of the recess portion 13 exist at the time when thenitride-based III-V Group compound semiconductor layer 15 is so grown asto have an isosceles triangle in section in which the bottom surface ofthe recess potion 13 constitutes a base of the triangle, and thisdislocation density is generally greater than in the case of FIG. 17D.As shown in FIG. 20B, when the growth is continued, dislocations goingthrough to the side faces of the nitride-based III-V Group compoundsemiconductor layer 15 having an isosceles triangle in section using thebottom surface of the recess portion 13 as a base are so behaved asfollows. Dislocations positioned at a level lower than the protrudedportion 12 continuedly extend to the side faces of the protruded portion12 in parallel to the main surface of the substrate 11 and disappear,and dislocations positioned at a level higher than the protruded portion12 extend in parallel to the main surface of the substrate 11 and gothrough to the side faces of the laterally grown nitride-based III-VGroup compound semiconductor layer 15. As shown in FIG. 20C, when thelateral growth of the nitride-based III-V Group compound semiconductorlayer 15 is further continued, nitride-based III-V Group compoundsemiconductor layers 15 grown from the opposite side of the protrudedportion 12 mutually combine together over the protruded portion 12, andthe nitride-based III-V Group compound semiconductor layer 15 finallyresults in a flat surface parallel to the main surface of the substrate11. The dislocations in the nitride-based III-V Group compoundsemiconductor layer 15 upwardly bend upon the mutual combination overthe protruded portion 12, resulting in threading dislocations 22.Although the density of the threading dislocations 22 is satisfactorilylow, it is higher than in case where micronuclei 14 are formed on thebottom surface of the recess portion at the initial stage of growth.This is because as shown in FIGS. 21A and 21B, dislocations occurringfrom the interface with the substrate 11 in case where no micronuclei 14are formed bend once in horizontal directions when arriving at aninclined face of an isosceles triangle using the bottom surface of therecess portion as a base. More particularly, in this case, no effect ofbundling dislocations in the course of the formation, growth andcombination of the micronuclei 14 is obtained.

FIG. 22 shows one of the results of simulation (ray tracing simulation)as to how an efficiency of light extraction from a light-emitting diodeto outside is improved when comparing the case where the depth of therecess of the substrate 11 is changed with the case where noirregularity is formed. The light extraction is carried out from thebask side of the substrate 11. In FIG. 22, the abscissa indicates adepth of the recess portion 13 (i.e. the height of the protruded portion12) and the ordinate indicates a degree of improvement in lightextraction efficiency η (light extraction magnification) in case whereno protruded portion 12 is formed. In this connection, the protrudedportion 12 has a striped shape extending in one direction, and an angleθ made between the side face of the protruded portion 12 and one mainsurface of the substrate 12 is at 135°, the length W_(g) of the base ofthe recess portion 13 is at 2 μm, and the length of the base of theprotruded portion 12 is at 3 μm. It is presumed that the refractiveindex of the substrate 11 is at 1.77 and the refractive index of thenitride-based III-V Group compound semiconductor layer 15 is at 2.35.From FIG. 22, the light extraction magnification is at 1.35 times orover for a depth of the recess potion 13 of 0.3 μm or over, at 1.5 timesor over for a depth of 0.5 μm to 2.5 μm, at 1.75 times for 0.7 μm to2.15 μm, at 1.85 times or over for 1 μm to 1.75 μm, and at a maximumvalue (of about 1.95 μm) for about 1.3 mm.

Next, consideration is given to the growth surface state in the vicinityof the active layer 17. In general, if threading dislocations exist in agrowth layer, growth pits or the like occurs, thereby worsening theflatness of the growth surface as shown in FIG. 23. A higher threadingdislocation density results in a greater degree of worsening. Ifthreading dislocations exist in the active layer 17, fluctuation inthickness and composition takes place within the plane thereof, whichcauses inplane inhomogeneity of an emission wavelength and planarcrystal defects such as an antiphase boundary defect to occur, therebyinviting a lowering of luminous efficiency (i.e. a lowering of internalquantum efficiency). In contrast, according to the first embodiment, thethreading dislocation density in the nitride-based III-V Group compoundsemiconductor layer 15 is so significantly reduced as statedhereinbefore. Accordingly, the threading dislocation in the active layer17 formed on the layer 15 also becomes low, so that the lowering ofluminous efficiency ascribed to the threading dislocation is very smalland thus, a higher luminous efficiency over a known counterpart can beobtained.

The threading dislocations in the nitride-based III-V Group compoundsemiconductor layer 15 concentrate in the vicinity of the centralportion of the protruded portion of the substrate 11 and are regularlyarranged according to the arrangement of the protruded portions 12,under which the threading dislocations in the active layers 17 areregularly arranged accordingly. Thus, an area of a portion where theflat surface of the active layer 17 is formed significantly increaseswhen compared with the case where threading dislocations are randomlydistributed, so that the luminous efficiency can be further improvedthereby.

Further, when the growth surface is roughened, for example, in casewhere the In content in the active layer is high, crystal defects in theform of complexes of planar crystal defects such as an antiphaseboundary defect and dislocations are liable to freshly occur from theactive layer 17, thereby inviting a lowering of luminous efficiency. Incontrast, according to the first embodiment of the invention, thesurface flatness of the active layer 17 is remarkably improved as statedhereinbefore, so that such crystal defects are suppressed fromoccurring, with a luminous efficiency not lowering.

In order to improve the flatness of the growth surface of the activelayer 17 and reduce the planar crystal defects in number, it iseffective to constitute a barrier layer of the active layer 17 by use ofAl-doped GaN, Al-doped GaInN, AlGaN or the like (see U.S. Pat. No.3,543,628).

As stated hereinabove, according to the first embodiment, no space isformed between the substrate 11 and the nitride-based III-V Groupcompound semiconductor layer 15, so that the lowering of lightextraction efficiency due to the space can be prevented. The threadingdislocations in the nitride-based III-V Group compound semiconductorlayer 15 concentrate in the vicinity of the central portion of theprotruded portion 12 of the substrate 11, and a dislocation density atthe other portions is, for example, as low as about 6×10⁷/cm² and isthus remarkably reduced over the case using a conventionally indentedsubstrate. Accordingly, the crystallinity of the nitride-based III-VGroup compound semiconductor layer 15 and a nitride-based III-V Groupcompound semiconductor layer such as for the active layer 17 grownthereon is much improved, with a considerable reduction in number ofnon-emission centers. In this manner, there can be obtained anitride-based III-V Group compound semiconductor-based light-emittingdiode whose luminous efficiency is very high.

Additionally, epitaxial growth necessary for manufacturing thenitride-based III-V Group compound semiconductor-based light-emittingdiode is needed only once. Not only no growth mask is necessary, butalso the protruded portion 12 on the substrate 11 can be formed byforming, on the substrate 11, a film serving as a material for theprotruded portion 12, e.g. an SiO₂ film, an SiON film, an SiN film, aCrN film, a CrON film or the like, and processing the film such as byetching, a powder blasting method, a sand blasting method or the like.Thus, no processing of the substrate 1 such as a sapphire substrate thatis difficult in indentation processing is needed. Eventually, there canbe manufactured a light-emitting diode using nitride-based III-V Groupcompound semiconductors by a simple procedure at low costs.

Next, a second embodiment of the invention is described.

In this second embodiment, at the time when the nitride-based III-VGroup compound semiconductor layer 15 is grown to an extent of making anisosceles triangle in section using the bottom surface of the recessportion 13 as a base thereof, the height of the protruded portion 12 isso selected that the height of the nitride-based III-V Group compoundsemiconductor layer 15 is lower than the height of the protruded portion12. For an instance, the case where the height of the nitride-basedIII-V Group compound semiconductor layer 15 is equal to the height ofthe protruded portion 12 is shown in FIGS. 25A and 25B. This leads tothe fact that all dislocations, which occur from the interface with thesubstrate 11 and go through to the side faces of the nitride-based III-VGroup compound semiconductor layer 5 having an isosceles triangle insection using the bottom surface of the recess portion 13 as a basethereof, continuedly extend to the side face of the protruded portion 12in parallel to the main surface of the substrate 1 and finallydisappear. Hence, the threading dislocations 22 passing through to thesurface of the nitride-based III-V Group compound semiconductor layer 15are considerably reduced in number, thereby permitting a threadingdislocation density to be substantially at zero.

The second embodiment other than those described above is similar to thefirst embodiment.

According to the second embodiment, since the nitride-based III-V Groupcompound semiconductor layer 15 whose threading dislocation density issubstantially at zero can be grown, a substantially dislocation-freenitride-based III-V Group compound semiconductor substrate can beobtained. For example, when an n-type nitride-based III-V Group compoundsemiconductor layer 16, an active layer 17 and a p-type nitride-basedIII-V Group compound semiconductor layer 18 are grown on thisdislocation-free nitride-based III-V Group compound semiconductorsubstrate, dislocation densities in these layers can be remarkablyreduced, with the attendant advantage that a nitride-based III-V Groupcompound semiconductor-based light-emitting diode having very goodcharacteristics can be realized. Needless to say, similar advantages asin the first embodiment can also be obtained.

Next, a third embodiment of the invention is described.

In the third embodiment, as shown in FIG. 26, a protruded portion 12formed on a substrate 11 is shaped in the form of an isosceles trianglein section and in the form of a comb as viewed in plane.

The third embodiment other than those described above is similar to thefirst embodiment.

According to this third embodiment, similar advantages as in the firstembodiment can be obtained.

A fourth embodiment of the invention is described.

In the fourth embodiment, as shown in FIG. 27, the thickness of thenitride-based III-V Group compound semiconductor layer 15 is smallerthan the height of the protruded portion 12 and the top of the protrudedportion 12 projects from the upper surface of the nitride-based III-VGroup compound semiconductor layer 15.

The fourth embodiment other than those described above is similar to thefirst embodiment.

According to the fourth embodiment, similar advantages as in the firstembodiment can be obtained.

A fifth embodiment of the invention is now described. In the fifthembodiment, as shown in FIG. 28, a mesa portion 20, a p-side electrode19 and an n-side electrode 21 are so arranged as being rotated by 90°within a plane parallel to the one main surface of the substrate 11.

The fifth embodiment other than those described above is similar to thefirst embodiment.

According to the fifth embodiment, advantages as in the first embodimentcan be obtained.

Next, a sixth embodiment is described.

In the sixth embodiment, as shown in FIG. 29, the protruded portion 12consists of a first portion 12 a having a triangle in section and afilm-shaped second portion 12 b covering the first portion 12 atherewith. These first portion 12 a and second portion 12 b are formedof materials of different types. The materials for forming the firstportion 12 a and the second portion 12 b include, for example, those setforth hereinbefore and are selected as required. In particular, thematerial for the first portion 12 a is a dielectric material such asSiO₂ and the material for the second portion 12 b is a metal or analloy.

The sixth embodiment other than those described above is similar to thefirst embodiment.

According to the sixth embodiment, not only similar advantages as in thefirst embodiment are obtained, but also the following advantage can beobtained. More particularly, since the second portion 12 b of theprotruded portion 12 is made of a metal or an alloy, light emitted fromthe active layer 17 can be reflected to a side opposite to the substrate11 by means of the second portion 12 b, which is advantageous in thecase where light is extracted from the opposite side of the substrate 11to outside.

It will be noted where it is intended to extract light from the side ofthe substrate 11, at least one of the first portion 12 a and the secondportion 12 b may be formed of a transparent conductor such as ITO, IZO,ZO or the like. In addition, the second portion 12 b may be providedwith an opening (window) so as to partially expose the first portion 12a of the protruded portion 12.

Next, a seventh embodiment of the invention is described.

In the seventh embodiment, as shown in FIG. 30, the protruded portion 12is constituted of a film-shaped first portion 12 a and a second portion12 b covering the first portion 12 a therewith and having an isoscelestriangle in section. The first portion 12 a and the second portion 12 bare, respectively, formed of materials of different types. The materialsforming the first portion 12 a and the second portion 12 b are,respectively, those mentioned hereinbefore and are properly selected asrequired. Specific examples include a dielectric material such as SiO₂for the first portion 12 a and a metal or an alloy for the secondportion 12 b.

The seventh embodiment other than those described above is similar tothe first embodiment.

According to the seventh embodiment, similar advantages as in the firstand sixth embodiments can be obtained.

Next, an eighth embodiment of the invention is described.

In the eighth embodiment, as shown in FIG. 31, the nitride-based III-VGroup compound semiconductor layer 15 used is of a p-type, on which ap-type nitride-based III-V Group compound semiconductor layer 18, anactive layer 17 and an n-type nitride-based III-V Group compoundsemiconductor layer 16 are successively grown. Thereafter, an n-sideelectrode 21 is formed on the n-type nitride-based III-V Group compoundsemiconductor layer 16, and the p-type nitride-based III-V Groupcompound semiconductor layer 18, the active layer 17 and the n-typenitride-based III-V Group compound semiconductor layer 16 are subjectedto etching to form a mesa portion 20. A p-side electrode 19 is formed onthe p-type nitride-based III-V Group compound semiconductor layer 15 ata portion thereof adjacent to the mesa portion 20.

According to the eighth embodiment, advantages as in the firstembodiment can be obtained.

A ninth embodiment of the invention is now described. In the ninthembodiment, as shown in FIG. 32, a reflective film 23 is formed on aback side of the substrate 11.

The ninth embodiment other than those described above is similar to thefirst embodiment.

According to the ninth embodiment, not only advantages as in the firstembodiment are obtained, but also the following advantage can beobtained. More particularly, since the reflective film 23 is formed onthe back side of the substrate 11, light emitted from the active layer17 can be reflected toward a side opposite to the substrate 11, thusbeing beneficial in case where light is extracted from the opposite siderelative to the substrate 11 to outside.

A tenth embodiment of the invention is described.

In the tenth embodiment, as shown in FIG. 33, the light-emitting diodeshown in FIG. 31 is formed with a reflective film 23 at the back side ofthe substrate 11.

The tenth embodiment other than those described above is similar to thefirst embodiment.

According to the tenth embodiment, similar advantages as in the firstand ninth embodiments can be obtained.

An eleventh embodiment of the invention is now described.

In the eleventh embodiment, as shown in FIG. 34, no mesa portion 20 isformed with respect to the n-type nitride-based III-V Group compoundsemiconductor layer 16, active layer 17 and p-type nitride-based III-VGroup compound semiconductor layer 18. In addition, the substrate 11used is a conductive one and an n-side electrode 21 is formed on theback side of the substrate 11.

The eleventh embodiment other than those described above is similar tothe first embodiment.

According to the eleventh embodiment, similar advantages as in the firstembodiment can be obtained. Light emitted from the active layer 17spreads toward the p-side electrode 19 and the n-side electrode 21. Whenthe types of materials for the substrate 11 and the protruded portion12, the arrangement of the protruded portion 12 and a high reflectiveelectrode or a transparent electrode used as the p-side electrode 19 andthe n-side electrode 21 are properly selected, alight extractiondirection can be controlled.

Next, a twelfth embodiment of the invention is described.

In the twelfth embodiment, as shown in FIG. 35, the nitride-based III-VGroup compound semiconductor layer 15 used is of a p-type, on which ap-type nitride-based III-V Group compound semiconductor layer 18, anactive layer 17 and an n-type nitride-based III-V Group compoundsemiconductor layer 16 are successively grown. Thereafter, an n-sideelectrode 21 is formed on the n-type nitride-based III-V Group compoundsemiconductor layer 16. No mesa portion 20 is formed with respect to thep-type nitride-based III-V Group compound semiconductor layer 18, theactive layer 17 and the n-type nitride-based III-V Group compoundsemiconductor layer 16. The substrate 11 used is a conductive one, and ap-side electrode 19 is formed on the backside of the substrate 11.

The twelfth embodiment other than those described above is similar tothe first embodiment.

According to the twelfth embodiment, similar results as in the firstembodiment can be obtained.

Next, a thirteenth embodiment of the invention is described.

In the thirteenth embodiment, as shown in FIG. 36, no mesa portion 20 isformed with respect to the n-type nitride-based III-V Group compoundsemiconductor layer 16, active layer 17 and p-type nitride-based III-VGroup compound semiconductor layer 18. The protruded portion 12 isformed of a conductive material (including a transparent conductivematerial such as ITO, IZO, ZO or the like) and is used as an n-sideelectrode 21.

The thirteenth embodiment other than those described above is similar tothe first embodiment.

According to the thirteenth embodiment, similar advantages as in thefirst embodiment can be obtained. Besides, since the protruded portion12 serves also as the n-side electrode 21, no process of forming then-side electrode 21 is necessary, with the attendant advantage that themanufacturing process becomes simple with a reduction of manufacturingcosts. The protruded portions 12 act as the n-side electrode 21 inseparate form, so that a current crowding phenomenon can be preventedfrom occurring in the course of operation of the light-emitting diode,thus being effective for a high power, high luminance and large area ofa light-emitting diode.

Next, a fourteenth embodiment of the invention is described.

In the fourteenth embodiment of the invention, as shown in FIG. 37, thenitride-based III-V Group compound semiconductor layer 15 used is ap-type one, on which a p-type nitride-based III-V Group compoundsemiconductor layer 18, an active layer 17 and an n-type nitride-basedIII-V Group compound semiconductor layer 16 are successively grown.Thereafter, an n-side electrode 21 is formed on the n-type nitride-basedIII-V Group compound semiconductor layer 16. No mesa portion 20 isformed with respect to the p-type nitride-based III-V Group compoundsemiconductor layer 18, the active layer 17 and the n-type nitride-basedIII-V Group compound semiconductor layer 16. The protruded portion 12 isformed of a conductive material (including a transparent conductivematerial such as ITO or the like) and used as a p-side electrode 19.

The fourteenth embodiment other than those described above is similar tothe first embodiment.

According to the fourteenth embodiment, similar advantages as in thefirst embodiment can be obtained. Besides, since the protruded portion12 serves also as the p-side electrode 19, no process of forming thep-side electrode 19 is necessary, with the attendant advantage that themanufacturing process becomes simple with a reduction of manufacturingcosts. The protruded portions act as the p-side electrode 19 in separateform, so that a current crowding phenomenon can be prevented fromoccurring in the course of operation of the light-emitting diode, thusbeing effective for a high power, high luminance and large area of alight-emitting diode.

Next, a fifteenth embodiment of the invention is described.

In the fifteenth embodiment, as shown in FIG. 38, the step of formingprotruded portions 12 and growing the nitride-based III-V Group compoundsemiconductor layer 15 like the first embodiment starts from formingprotruded portions 12 on the substrate 11, followed by repeating thestep plural times. The protruded portions 12 in the respective layersare formed at the same position within planes parallel to the mainsurface of the substrate 11. The uppermost nitride-based III-V Groupcompound semiconductor layer 15 is successively grown thereon, forexample, with an nitride-based III-V Group compound semiconductor layer16, an active layer 17 and a p-type nitride-based III-V Group compoundsemiconductor layer 18 like the first embodiment.

The fifteenth embodiment other than those described above is similar tothe first embodiment.

According to the fifteenth embodiment, in addition to the advantages asattained in the first embodiment, because the formation of the protrudedportions 12 and the growth of the nitride-based III-V Group compoundsemiconductor layer 15 are repeated plural times, a more uppernitride-based III-V Group compound semiconductor layer 15 exhibitsbetter crystallinity. This is advantageous in that the crystallinity ofthe n-type nitride-based III-V Group compound semiconductor layer 16,active layer 17 and p-type nitride-based III-V Group compoundsemiconductor layer 18 grown on the more upper layer 15 can beremarkably improved. In this connection, threading dislocationsoccurring as concentrated in the nitride-based III-V Group compoundsemiconductor layer 15 formed over the protruded portions 12 can becovered with the upper protruded portions 12. This is particularlyconvenient for improving the crystallinity of the more uppernitride-based III-V Group compound semiconductor layer 15. A pluralityof protruded portions 12 are, respectively, constituted of a conductivematerial and the protruded portions 2 in these plural layers areshort-circuited by wiring, for which the current crowding phenomenon inthe course of operation of a light-emitting diode can be moreeffectively prevented. This technique may be effective for whichevertype of nitride-based III-V Group compound semiconductor layer 15, i.e.a p-type or an n-type. Especially, a p-type nitride-based III-V Groupcompound semiconductor layer 15 is small in carrier concentration (holeconcentration and also in mobility, so that the effect of suppressingthe current crowding phenomenon is very high, thereby leading to aremarkably improved luminous efficiency. If the protruded portions 12 inthe plural layers are electrically disconnected from one another, theprotruded portions 12 in the individual layers function as anindependent wiring, permitting easy connection and mounting of varioustypes of electronic devices.

Next, a sixteenth embodiment of the invention is described.

In the sixteenth embodiment, as shown in FIG. 39, the step of formingprotruded portions 12 and growing the nitride-based III-V Group compoundsemiconductor layer 15 like the first embodiment starts from formingprotruded portions 12 on the substrate 11, followed by repeating thestep plural times. In this case, the protruded portions in therespective layers are formed at positions that are mutually shifted by ahalf cycle within planes parallel to the main surface of the substrate11. Like the first embodiment. The uppermost nitride-based III-V Groupcompound semiconductor layer 15 is successively grown thereon, forexample, with an nitride-based III-V Group compound semiconductor layer16, an active layer 17 and a p-type nitride-based III-V Group compoundsemiconductor layer 18.

The sixteenth embodiment other than those described above is similar tothe first embodiment.

According to the sixteenth embodiment, similar advantages as in thefirst and fifteenth embodiments can be obtained.

A seventeenth embodiment of the invention is now described.

In the seventeenth embodiment, as shown in FIG. 40, protruded portion 12are formed on a substrate 11, and a nitride-based III-V Group compoundsemiconductor layer 15 is grown, like the first embodiment, followed byfurther formation of protruded portions 12. Like the first embodiment,for example, an n-type nitride-based III-V Group compound semiconductorlayer 16 is further grown. Next, an active layer 17 and a p-typenitride-based III-V Group compound semiconductor layer 18 aresuccessively grown on the n-type nitride-based III-V Group compoundsemiconductor layer 16. Thereafter, protruded portions 12 are formed onthe p-type nitride-based III-V Group compound semiconductor layer 18,followed by further growth of a p-type nitride-based III-V Groupcompound semiconductor layer 24, like the first embodiment.

The seventeenth embodiment other than those described above is similarto the first embodiment.

According to the seventeenth embodiment, similar advantages as in thefirst and fifteenth embodiments can be obtained.

Next, an eighteenth embodiment of the invention is described.

In the eighteenth embodiment, as shown in FIG. 41, protruded portion 12are formed on a substrate 11, and a nitride-based III-V Group compoundsemiconductor layer 15 is grown, like the first embodiment, followed byfurther formation of protruded portions 12 thereon. Like the firstembodiment, for example, an n-type nitride-based III-V Group compoundsemiconductor layer 16 is further grown. Next, an active layer 17 and ap-type nitride-based III-V Group compound semiconductor layer 18 aresuccessively grown on the n-type nitride-based III-V Group compoundsemiconductor layer 16. Thereafter, protruded portions 12 are formed onthe p-type nitride-based III-V Group compound semiconductor layer 18,followed by further growth of a p-type nitride-based III-V Groupcompound semiconductor layer 24, like the first embodiment. In thiscase, the protruded portions 12 in the respective layers are,respectively, formed at positions shifted by a half cycle within planesparallel to the main surface of the substrate 11.

The eighteenth embodiment other than those described above is similar tothe first embodiment.

According to the eighteenth embodiment, similar advantages as in thefirst and fifteenth embodiment can be obtained.

A nineteenth embodiment of the invention is described.

In the nineteenth embodiment, as shown in FIG. 42, protruded portions 12are formed on a substrate 11 and an n-type nitride-based III-V Groupcompound semiconductor layer 16 is, for example, grown like the firstembodiment, followed by successive growth of an active layer 17 a p-typenitride-based III-V Group compound semiconductor layer 18 thereon. Next,protruded portions 12 are formed on the p-type nitride-based III-V Groupcompound semiconductor layer 18, followed by growth of a p-typenitride-based III-V Group compound semiconductor layer 24 like the firstembodiment. The protruded portions in the respective layers are,respectively, formed at the same position within planes parallel to themain surface of the substrate 11.

Examples of a planar shape of the protruded portions 12 below the activelayer 17 are shown in FIGS. 43A to 43C, and examples of a planar shapeof the protruded portions above the active layer 17 are shown in FIGS.44A to 44C. The planar shapes of the protruded portion 12 below theactive layer 17 and the protruded portion 12 above the active layer 17may be used in arbitrary combination.

The nineteenth embodiment other than those described above is similar tothe first embodiment.

According to the nineteenth embodiment, similar advantages as in thefirst and fifteenth embodiments can be obtained.

It will be noted that in FIG. 42, either of the lower side protrudedportions 12 and the upper side protruded portions 12 sandwiching theactive layer 17 therebetween may be made of an electric conductor suchas a metal, an alloy, a transparent conductor or the like. Especially,where a conductor such as a metal, an alloy, a transparent conductor orthe like is used as a material for the upper side protruded portions 12relative to the active layer 17, it is possible to form a reflectiveelectrode 25 in contact with the protruded portions 12 and further forma p-side electrode 19 thereon as is particularly shown in FIG. 45.Alternatively, if the conductor, such as a metal, an alloy, atransparent conductor or the like, is used as a material for the upperside protruded portion 12 relative to the active layer 17 is eitheroptically transparent or reflective, the thickness of the nitride-basedIII-V Group compound semiconductor layer 24 may be appropriatelycontrolled, for example, at λ/4 (λ is an emission wavelength), followedby forming a reflective electrode 25 thereon in contact with theprotruded portions 12 and further forming, for example, a p-sideelectrode 19 as shown in FIG. 46. In this way, it becomes possible toform a structure capable of reflecting light generated at the activelayer from arbitrary direction toward the side of the substrate 11 whileensuring a good current pass from the p-side electrode 19 upon operationof the light-emitting diode.

Next, a twentieth embodiment of the invention is described.

In the twentieth embodiment, after the steps before the formation of thep-side electrode are performed in the same manner as in the eleventhembodiment shown in FIG. 34, the substrate 11 is removed to expose theback side of the n-type nitride-based III-V Group compound semiconductorlayer 15. Thereafter, as shown in FIG. 47, an n-side electrode 21 isformed on the back side of the nitride-based III-V Group compoundsemiconductor layer 15.

If the p-side electrode 19 and the n-side electrode 21 are each made ofa high reflective electrode or transparent electrode, a light extractiondirection can be selected.

The removal of the substrate 11 permits the resulting light-emittingdiode to be totally very small in thickness. In order to improvemechanical strength, a support substrate S may be attached and bonded tothe p-side electrode 19 through a metal electrode M as shown in FIG. 48.The support substrate S may be either conductive or non-conductive sofar as the support substrate S has such a structure as to pass anelectric current to the light-emitting diode through the metal electrodeM.

The twentieth embodiment other than those described above is similar tothe first embodiment.

According to the twentieth embodiment, similar advantages as in thefirst embodiment can be obtained.

Next, a twenty-first embodiment of the invention is described.

In the twenty-first embodiment, after the steps before the formation ofthe n-side electrode 21 are performed in the same manner as in thetwelfth embodiment shown in FIG. 35, the substrate 11 is removed toexpose the back side of the p-type nitride-based III-V Group compoundsemiconductor layer 15. As shown in FIG. 49, a p-side electrode 19 isformed on the back side of this nitride-based III-V Group compoundsemiconductor layer 15.

The twenty-first embodiment other than those described above is similarto the first embodiment.

According to the twenty-first embodiment, similar advantages as in thefirst embodiment can be obtained.

A twenty-second embodiment of the invention is described.

In the twenty-second embodiment, as shown in FIG. 50A, protrudedportions having a trapezoid in section are formed on a substrate 11 atgiven intervals as viewed in plane. Thus, a recess portion 13 having aninverted trapezoid in section are formed between the protruded portions12.

Next, the nitride-based III-V Group compound semiconductor layer 15 isgrown in the same manner as in the first embodiment. More particularly,the nitride-based III-V Group compound semiconductor layer 15, which hasan isosceles triangle in section using the bottom surface of the recessportion 13 as a base thereof, is grown through the steps of formation,growth and combination of micronuclei on the bottom surface of eachrecess portion as shown in FIG. 50B. Moreover, as shown in FIG. 50C, thenitride-based III-V Group compound semiconductor layer 15 having a flatsurface and a low threading dislocation density is further grown throughlateral growth.

Next, further steps are carried out in the same manner as in the firstembodiment to obtain an intended, nitride-based III-V Group compoundsemiconductor-based light-emitting diode as shown in FIG. 51.

The twenty-second embodiment other than those described above is similarto the first embodiment.

FIG. 52 schematically shows the results of checking a crystal defectdistribution in the nitride-based III-V Group compound semiconductorlayer 15 by TEM.

According to this twenty-second embodiment, similar advantages as in thefirst embodiment can be obtained.

FIGS. 53 to 55, respectively, show an instance of the results ofsimulation of a change in efficiency of light extraction from alight-emitting diode to outside in cases where protruded and recessportions are formed on the substrate 11 and no such portions are formed.In all cases, light extraction is performed from the back side of thesubstrate 11.

In FIG. 53, the abscissa indicates a refractive index of the protrudedportion 12 and the ordinate indicates a degree of improvement (lightextraction magnification) of a light extraction efficiency η in casewhere no protruded portion is formed. In FIG. 53, data indicated by ▴ isfor the case where the protruded portion 12 is in the form of aone-dimensional stripe (1D) as shown in FIG. 4, and data indicated by ●is for the case of a two-dimensional arrangement where one-dimensionalstripe-shaped, protruded portions 12 mutually intersect each other (2D).The angle θ made between the side face of the protruded portion and theone main surface of the substrate 11 is 135°, the length W_(g) of thebottom surface of the recess portion is at W_(g)=2 μm, and the length ofthe base of the protruded portion 12 is at 3 μm. It is assumed that therefractive index of the substrate 11 is at 1.77 and the refractive indexof the nitride-based III-V Group compound semiconductor layer 15 is at2.35. From FIG. 53, it will be seen that the light extraction efficiencybecomes maximal when the refractive index of the protruded portion 12 isat 1.4 for both 1D and 2D and becomes satisfactorily great within arange of refractive index of 1.2 to 1.7. 2D is greater than 1D withrespect to the light extraction magnification.

It will be noted that these results are true of the case where thesection of the protruded portion 12 is triangular as in the firstembodiment.

In FIG. 54, the abscissa indicates an angle θ made between the side faceof the protruded portion 12 and the one main surface of the substrate11, and the ordinate indicates a light extraction magnification. In FIG.54, data indicated by ▴ is for the case where the protruded portion 12is in the form of a one-dimensional stripe (1D) as shown in FIG. 4, anddata indicated by ● is for the case of a two-dimensional arrangementwhere one-dimensional stripe-shaped, protruded portions 12 mutuallyintersect each other (2D). The length W_(g) of the bottom surface of therecess portion 13 is at W_(g)=3 μm, and the length of the base of theprotruded portion 12 is at 2 μm. It is assumed that the refractive indexof the substrate 11 is at 1.77, the refractive index of the protrudedportion is at 1.4, and the refractive index of the nitride-based III-VGroup compound semiconductor layer 15 is at 2.35. From FIG. 54, it willbe seen that the light extraction magnification is as great as 1.55times or over when the angle θ made between the side face of theprotruded portion 12 and the one main surface of the substrate is withina range of 100°<θ160° for both 1D and 2D, is very great at 1.75 times orover within a range of 132°<θ<139° and becomes maximal, especially, atθ=135°. In addition, the factor is very great at 1.75 times or over evenwithin a range of 147°<θ<154° and becomes maximal, especially, atθ=152°. 2D is greater than 1D with respect to the light extractionmagnification.

These results are true of the case where the section of the protrudedportion 12 is triangular as in the first embodiment.

In FIG. 55, the abscissa indicates a depth d of the recess portion 13and the ordinate indicates a degree of improvement of light extractionefficiency η (light extraction magnification) in case where no protrudedportion 12 is formed. The protruded portion 12 has a one-dimensionalstriped shape as shown in FIG. 4. The ratio between the length W_(g) ofthe base of the recess portion 13 and the length of the base of theprotruded portion 12 is at 3:2. It is assumed that the refractive indexof the substrate 11 is at 1.77, the refractive index of the protrudedportion 12 is at 1.4, and the refractive index of the nitride-basedIII-V Group compound semiconductor layer 15 is at 2.35. From FIG. 55, itwill be seen that the light extraction magnification increases with anincreasing depth of the recess portion 13.

A twenty-third embodiment of the invention is now described.

In the twenty-third embodiment, as shown in FIG. 56A, the nitride-basedIII-V Group compound semiconductor layer 15 is grown until the surfacebecomes flat in the same manner as in the first embodiment, after whicha portion where threading dislocations 22 concentrate over the protrudedportion 12 is selectively removed by etching or the like so that thesurface of the protruded portion 12 at this portion is exposed.

Next, as shown in FIG. 56B, a nitride-based III-V Group compoundsemiconductor layer 26 is laterally grown from the left nitride-basedIII-V Group compound semiconductor layers 15.

Thereafter, the steps after the growth of the n-type nitride-based III-VGroup compound semiconductor layer 16 are performed in the same manneras in the first embodiment to provide a light-emitting diode.

According to this twenty-third embodiment, similar advantages as in thefirst embodiment can be obtained.

Next, a twenty-fourth embodiment of the invention is described.

In the twenty-fourth embodiment, as shown in FIG. 57A, a protrudedportion 12 is formed on a substrate 11 and a nitride-based III-V Groupcompound semiconductor layer 15 is grown in the same manner as in thefirst embodiment.

Next, as shown in FIG. 57B, a mask (not shown) corresponding to theprotruded portion 12 is formed on the nitride-based III-V Group compoundsemiconductor layer 15 at a portion above the protruded portion 12,after which the nitride-based III-V Group compound semiconductor layer15 is etched or abraded, for example, by a RIE method, a powder blastingmethod, a sand blasting method or the like until the substrate 11 isexposed.

Next, after removal of the mask, as shown in FIG. 58A, a nitride-basedIII-V Group compound semiconductor layer 26 is laterally grown fromopposite sides of the thus patterned nitride-based III-V Group compoundsemiconductor layer 15 to bury a space between the nitride-based III-VGroup compound semiconductor layers 15 therewith as shown in FIG. 58B.At this stage, a space is formed between the nitride-based III-V Groupcompound semiconductor layer 26 and the substrate 11.

Thereafter, as shown in FIG. 59A, the substrate is removed or peeledoff. The removal or peeling of the substrate 11 can be performed, asshown in FIG. 58B, chemically or mechanically (physically) by using aspace formed between the nitride-based III-V Group compoundsemiconductor layer 26 and the substrate 11. More particularly, forexample, a given type of etchant or etching gas (reactive gas) is spreadinto a space to etch the substrate from the sides of the nitride-basedIII-V Group compound semiconductor layers 15, 26 for the removal orpeeling. Alternatively, heat may be applied to the space, protrudedportion 12 or peripheral material layers thereof, or ultrasonic wavesmay be irradiated thereto to mechanically peel off the substrate 11.Moreover, a laser beam such as from a YAG laser, an excima laser or thelike may be used for this purpose.

Next, if the protruded portion is left, this is completely removed byetching. In this way, a nitride-based III-V Group compound semiconductorsubstrate 27 consisting of the nitride-based III-V Group compoundsemiconductor layers 15, 26 is obtained as shown in FIG. 59B.

For removal or peeling of the substrate 11, there may be used methodsincluding a method in which the protruded portion 12 is selectivelydissolved or molten, for example, by a chemical or thermal technique anda method in which a low temperature buffer layer (e.g. a buffer layermade of GaN, AlN, AlGaN, CrN or the like) is selectively dissolved ormolten, for example, by a chemical or thermal technique. These methodscan be properly selected depending on the resistance or durability ofthe nitride-based III-V Group compound semiconductor layers 15, 26.Especially, where CrN is used as a material of the protruded portion 12,a CrN buffer layer may be used as a low temperature buffer layer, forwhich the nitride-based III-V Group compound semiconductor layers 15, 26can be readily peeled off from the substrate 11, such as a sapphiresubstrate, in a chemical manner.

At this stage, the nitride-based III-V Group compound semiconductorsubstrate 27 becomes irregular at the back side thereof, and the backside of the substrate 27 is flattened such as by polishing.

In this manner, as shown in FIG. 59C, there can be obtained thenitride-based III-V Group compound semiconductor substrate 27 in whichboth main surfaces are flat.

When given types of nitride-based III-V Group compound semiconductorlayers are grown on this nitride-based III-V Group compoundsemiconductor substrate 27, various types of semiconductor devices suchas a light-emitting diode can be manufactured.

Next, a twenty-fifth embodiment of the invention is described.

In the twenty-fifth embodiment, as shown in FIG. 57B, a mask (not shown)corresponding to the protruded portion 12 is formed on the nitride-basedIII-V Group compound semiconductor layer 15 at a portion above theprotruded portion 12, after which the nitride-based III-V Group compoundsemiconductor layer 15 is etched or abraded to a depth indicated by thedashed-dotted line as shown in FIG. 57B, for example, by a RIE method, apowder blasting method, a sand blasting method of the like. In thiscase, etching or abrasion is stopped prior to exposure of the substrate11.

Subsequent steps are performed in the same manner as in thetwenty-fourth embodiment.

According to the twenty-fourth embodiment, similar advantages as in thefirst embodiment can be obtained.

Next, a twenty-sixth embodiment of the invention is described.

In the twenty-sixth embodiment, as shown in FIG. 60A, a mask (not shown)that is smaller in width than the nitride-based III-V Group compoundsemiconductor layer 15 at a portion above the protruded portion 12 isformed, after which the nitride-based III-V Group compound semiconductorlayer 15 is etched or abraded by use of the mask, for example, by a RIEmethod until the layer 15 is exposed.

Next, after removal of the mask, as shown in FIG. 60B, a nitride-basedIII-V Group compound semiconductor layer 26 is laterally grown fromopposite sides of the thus patterned nitride-based III-V Group compoundsemiconductor layer 15 to bury a space between the adjacentnitride-based III-V Group compound semiconductor layers 15. At thistime, a space is formed between the nitride-based III-V Group compoundsemiconductor layer 26 and the substrate 11 as shown.

Thereafter, subsequent steps are performed in the same manner as in thetwenty-fourth embodiment.

According to the twenty-sixth embodiment, similar advantages as in thefirst embodiment can be obtained.

Next, a twenty-seventh embodiment of the invention is described.

In the twenty-seventh embodiment, as shown in FIG. 61A, a planar mask(not shown) is formed on the nitride-based III-V Group compoundsemiconductor layer 15 at a portion above the recess portion 12 so as tobridge over part of the protruded portion 12 and all of the recessportions 13. Thereafter, the nitride-based III-V Group compoundsemiconductor layer 15 is etched such as by a RIE method, or abradeduntil the protruded portion 12 is exposed.

Subsequently, after removal of the mask, as shown in FIG. 61B, anitride-based III-V Group compound semiconductor layer 26 is laterallygrown from opposite sides of the thus patterned nitride-based III-VGroup compound semiconductor layer 15 to bury a apace between theadjacent nitride-based III-V Group compound semiconductor layers 15.

Thereafter, subsequent steps are preformed in the same manner as in thetwenty-fourth embodiment.

According to the twenty-seventh embodiment, similar advantages as in thefirst embodiment can be obtained.

Next, a twenty-eighth embodiment of the invention is described.

In the twenty-eighth embodiment, the steps before the formation of thep-side electrode 19 are performed in the same manner as in the firstembodiment, and subsequent steps differ therefrom. For the formation ofthe p-side electrode 19, it is preferred to interpose a Pd-containinglayer so as to prevent diffusion of an electrode material (e.g. Ag orthe like), or to apply a technique used for a boundary-free, amorphousbarrier metal layer by forming a layer of a high melting metal such asTi, W, Cr or an alloy thereof, or a layer of a nitride of the highmelting metal (e.g. TiN, WN, TiWN, CrN or the like) thereon so as toprevent the occurrence of a failure caused by stress, heat or diffusion,toward the p-side electrode 19, of Au or Sn from an Au or Sn-containinglayer formed as an upper layer (a solder layer or a bump). The techniqueof interposing a Pd-containing layer is well known a Pd interposinglayer, for example, in a metal plating technique, and materials for thebarrier metal layer are known in an Al wiring technique and Ag wiringtechnique of Si-based electronic devices.

For the purpose of protecting the p-side electrode 19 that is in directcontact with the p-type nitride-based III-V Group compound semiconductorlayer 18 and is not resistant to thermal stress, there is shown aninstance of laminating, as a protecting layer, a high melting metal suchas Ti, W, Cr or an alloy thereof or a nitride of the high melting metal.This protecting layer may be used as an electrode that is in directcontact with the p-type nitride-based III-V Group compound semiconductorlayer 18. Because of good stress durability and adhesion reinforcement,the protecting layer may be not only applied to a side of the p-typenitride-based III-V Group compound semiconductor layer 18, but alsoused, especially, as an n-side electrode 21 in contact with the n-typenitride-based III-V Group compound semiconductor layer 15 in place of aconventionally employed Ti/Pt/Au electrode or as a first-layer n-sideelectrode. For a method using the adhesion reinforcement, a substratelaminating technique may be utilized, irrespective of the p-side orn-side, for the purpose of strengthening a metal-metal junction or ametal-dielectric junction. A specific example of imparting stressdurability or adhesion reinforcement includes one of which in case wherethe uppermost surface of a p-side electrode 19, which is formed of asingle-layer metal film or a multi-layer metal film, is made of Au, ahigh melting metal film made of Ti, W, Cr or an alloy thereof or anitride film of the just-mentioned metal is formed on a conductivesupport substrate, on which an Au film is formed and this Au film isbonded with the p-side electrode 19.

More particularly, in the twenty-eighth embodiment, as shown in FIG.62A, after formation of the p-side electrode 19, a Ni film 41 is formedby a lift method or the like so as to cover the p-side electrode 19therewith. Next, although not shown, a Pd film is, for example, formedto cover the Ni film 41, and a metal nitride film, e.g. a film of TiN,WN, TiWN, CrN or the like, is formed to cover the Pd film, followed byfurther formation of a film of Ti, W, Mo, Cr or an alloy thereof so asto cover the Pd film, if necessary. Alternatively, a Pd film may beformed so as to cover the p-side electrode 19 without formation of theNi film 41, followed by formation of a film of TiN, WN, TiWN, CrN or thelike to cover the Pd film and, if necessary, further formation of a filmof Ti, W, Mo, Cr or an alloy thereof to cover the nitride film.

Next, as shown in FIG. 62B, a resist pattern 42 of a given form isformed to cover the Ni film 41 and the Pd film by lithography.

As shown in FIG. 62C, etching is carried out, for example, by a RIEmethod using the resist pattern 42 as a mask to form a mesa portion 20of a trapezoid in section. The angle made between the inclined surfaceof the mesa portion 20 and the main surface of the substrate 11 is, forexample, at 35 degrees. If necessary, a λ/c dielectric film (λ is anemission wavelength) is formed on the inclined surfaces of the mesaportion 20.

As shown in FIG. 62D, an n-side electrode 21 is formed on the n-typenitride-based III-V Group compound semiconductor layer 15.

Next, as shown in FIG. 62E, a SiO₂ film 43 is formed on the entiresurface of the substrate as a passivation film. Where taking adhesion toan underlying layer, durability and corrosion resistance in processapplications into account, a SiN film or a SiON film may be used inplace of the SiO₂ film.

As shown in FIG. 62F, the SiO₂ film 43 is thinned by etching back, afterwhich an Al film 44 is formed, as a reflective film, on the SiO₂ film 43on the inclined surface of the mesa portion 20. This Al film 44 isprovided to reflect light generated from the active layer 17 toward theside of the substrate 11 to improve the light extraction efficiency. TheAl film 44 is formed in contact with the n-side electrode 21 at one endthereof. This is for the purpose of increasing light reflection by notpermitting a space to be created between the Al film 44 and the n-sideelectrode 21. Thereafter, a SiO₂ film 43 is again formed to provide athickness sufficient for the passivation film.

Next, as shown in FIG. 62G, the SiO₂ film 43 is removed by etching atportions thereof over the Ni film 41 and n-side electrode 21 to formopenings 45, 46 thereby exposing the Ni film 41 and the n-side electrode21 at these portions.

Next, as shown in FIG. 62H, a pad electrode 47 is formed on the Ni film41 at the opening 45, and a pad electrode 48 is also formed on then-side electrode 21 at the opening 46.

As shown in FIG. 62I, a bump mask material 49 is formed over the entiresubstrate surface, after which the bump mask material 49 is removed byetching at a portion above the pad electrode 48 to form an opening 50,and the pad electrode 48 is exposed at this portion.

As shown in FIG. 62J, the bump mask material 49 is used to form an Aubump 51 on the pad electrode 48. Next, the bump mask material 49 isremoved. After forming a bump mask material (not shown) over the entiresubstrate surface again, the bump mask material is removed by etching ata portion thereof above the pad electrode 47 to form an opening, therebypermitting the pad electrode 47 to be exposed at the portion.Thereafter, an Au bump 52 is formed on the pad electrode 47.

If necessary, the substrate 11 on which a light-emitting diode structurehas been formed in a manner as set out hereinabove is polished or lappedfrom the back side thereof to decrease the thickness thereof. Thesubstrate 11 is subsequently scribed to form a bar. The bar is furtherscribed to provide a chip.

It will be noted that the electrode laminate structure illustrated inFIGS. 62A to 62J is merely an instance and especially, where therespective electrode layers are formed as multi-layered, it is necessaryto improve adhesion between the p-side electrode 19 made of an Agelectrode and other metal layers, stress durability and anti-crackingproperty, to make a low contact resistance and to allow for highreflectivity by keeping the quality such as of an Ag electrode whiletaking into account suppression of stress occurrence ascribed to thedifferences in coefficient of thermal expansion of the respective metallayers accompanied by the rise of device temperature and suppression ofdiffusion between adjacent metal layers. Accordingly, such an Al wiringtechnique for Si-based electronic devices as set out above should beapplied to, if necessary.

Next, a twenty-ninth embodiment of the invention is described.

In the twenty-ninth embodiment, the manufacture of a light-emittingdiode backlight is described using, in addition to the bluelight-emitting diode and green light-emitting diode obtained accordingto the method of the first embodiment, a separately provided redlight-emitting diode (e.g. an AlGaInP light-emitting diode).

In the same manner as in the first embodiment, a blue light-emittingdiode structure is formed on a substrate 11, and a bump (not shown) isformed on a p-side electrode 19 and an n-side electrode 21,respectively, followed by chipping to obtain a blue light-emitting diodein the form of a flip-chip. Likewise, a green light-emitting diode isobtained in the form of a flip-chip. On the other hand, a redlight-emitting diode is formed such that an AlGaInP semiconductor isstacked on an n-type GaAs substrate to provide a diode structure, onwhich a p-side electrode is formed to provide an AlGaInP light-emittingdiode in the form of a chip.

These red light-emitting diode chip, green light-emitting diode chip andblue light-emitting diode chip are, respectively, mounted on a submountsuch as of AlN. These submounts are mounted on a substrate such as, forexample, an Al substrate in such a way that the submount is turned down.This is particularly shown in FIG. 63A. In FIG. 63A, indicated by 61 isa substrate, by 62 is a submount, by 63 is a red light-emitting diodechip, by 64 is a green light-emitting diode, and by 65 is a bluelight-emitting diode chip. These red light-emitting diode chip 63, greenlight-emitting diode chip 64 and blue light-emitting diode chip 65 eachhave a chip size, for example, of 350 μm square. The red light-emittingdiode chip 63 is mounted so that the n-side electrode is on the submount62, and the green light-emitting diode chip 64 and the bluelight-emitting diode chip 65 are mounted such that the p-side electrodeand the n-side electrode are on the submounts 62 through a bump,respectively. The submount 62 on which the red light-emitting diode chip63 is mounted has an extraction electrode (not shown) for n-sideelectrode formed in a given pattern. The n-side electrode side of thered light-emitting diode chip 63 is mounted in position of theextraction electrode. A wire 67 is bonded for connection between thep-side electrode of the red light-emitting diode chip 63 and a given padelectrode 66 formed on the substrate 61, and a wire (not shown) isbonded for connection between one end of the extraction electrode andanother pad electrode formed on the substrate 61. The submount 62 onwhich the green light-emitting diode chip 64 is mounted is formedthereon with an extraction electrode for p-side electrode and anextraction electrode for n-side electrode (both not shown) in a givenpattern, respectively. The p-side electrode and n-side electrode of thegreen light-emitting diode chip 64 are, respectively, mounted on givenportions of the extraction electrode for p-side electrode and theextraction electrode for n-side electrode through bumps. A wire (notshown) is bonded for connection between one end of the extractionelectrode for p-side electrode of the green light-emitting diode chip 64and a pad electrode provided on the substrate 61, and a wire (not shown)is bonded for connection between one end of the extraction electrode forn-side electrode and a pad electrode provided on the substrate 61. Thisis true of the blue light-emitting diode chip 65.

It will be noted that the submounts 62 may be omitted, in which the redlight-emitting diode chip 63, green light-emitting diode chip 64 andblue light-emitting diode chip 65 are mounted directly on an optionaltype of printed circuit board having a heat dissipating property, or aninner or outer wall of a board or casing having the function as aprinted circuit board. This permits the light-emitting diode backlightor panel to be reduced in cost as a whole.

Such a red light-emitting diode chip 63, green light-emitting diode chip64 and blue light-emitting diode chip 65 as set out above are providedas a unit (cell), and a necessary number of cells are arranged on thesubstrate 61 in a given pattern. An example of the arrangement is shownin FIG. 64. Next, as shown in FIG. 63B, potting with a transparent resin68 is performed so as to cover the unit therewith. Thereafter, thetransparent resin 68 is cured. The transparent resin 68 is solidified bythe curing and undergoes contraction slightly according with thesolidification (FIG. 63C). In this way, as shown in FIG. 65, there canbe obtained a light-emitting diode backlight in which units, each madeof the red light-emitting diode chip 63, green light-emitting diode chip64, and blue light-emitting diode chip 65, are arranged in an array onthe substrate 61. In this case, the transparent resin 68 is in contactwith the back side of the substrate 11 of the green light-emitting diodechip 64 and blue light-emitting diode chip 65, so that the difference inrefractive index becomes smaller than with the case where the back sideof the substrate 11 is in direct contact with air. This entails areduced ratio of reflection, at the back side of the substrate 11, oflight that passes through the substrate 11 to outside, thereby improvinga light extraction efficiency and thus improving an emission efficiency.

This light-emitting diode backlight is suited for use, for example, as abacklight of liquid crystal panels.

Next, a thirtieth embodiment of the invention is described.

In the thirtieth embodiment, a necessary number of red light-emittingdiode chips 63, green light-emitting diode chips 64 and bluelight-emitting diode chips 65 are arranged in a given pattern, like thetwenty-ninth embodiment. Thereafter, as shown in FIG. 66, a transparentresin 69 suited for the red light-emitting diode chip 63 is used forpotting so as to cover this light-emitting diode chip 63 therewith.Likewise, potting with a transparent resin 70 suited for the greenlight-emitting diode chip 64 is effected so as to cover thislight-emitting diode chip 64 therewith. Potting with a transparent resin71 suited for the blue light-emitting diode chip 65 is effected so as tocover the blue light-emitting diode chip 65 therewith. Thereafter, thetransparent resins 69 to 71 are, respectively, cured. The resins 69 to71 are solidified by the curing and undergo contract slightly accordingwith the solidification. In this manner, units, each made of the redlight-emitting diode chip 63, green light-emitting diode chip 64 andblue light-emitting diode chip 65, are arranged in an array on thesubstrate 61 to obtain a light-emitting diode backlight. In this case,the transparent resins 70, 71 are in contact with the back side of thesubstrate 11 of the green light-emitting diode chip 64 and bluelight-emitting diode chip 65, so that the difference in refractive indexbecomes smaller than with the case where the back side of the substrate11 is in direct contact with air. This entails a reduced ratio ofreflection, at the back side of the substrate 11, of light that passesthrough the substrate 11 to outside, thereby improving a lightextraction efficiency and thus improving an emission efficiency.

This light-emitting diode backlight is suited for use, for example, as abacklight of liquid panels.

Next, a thirty-first embodiment of the invention is described.

In the thirty-first embodiment, a light-emitting diode structure isformed on a substrate 11 according to the method of the firstembodiment, a p-side electrode 19 and an n-side electrode 21 are,respectively, shaped in a striped form. A bump (not shown) is formed onthe p-side electrode 19 and the n-side electrode 21, respectively,followed by scribing the substrate to provide a quadrangular piece witha given size. Thus, an integrated light-emitting diode having stripedemission units is obtained. In this case, the n-side electrode 21 isformed to surround a striped mesa portion 20. As shown in FIG. 68, thisintegrated light-emitting diode is mounted on a submount 72 made of AlNor the like. In this case, the submount 72 is formed thereon with anextraction electrode for p-side electrode and an extraction electrodefor n-side electrode (both not shown) in given patterns, respectively,on which solders 73, 74 are formed. The p-side electrode 19 and n-sideelectrode 21 of the integrated light-emitting diode are, respectively,aligned on the solders 73 and 74, after which the solders 73, 74 aremelted for bonding.

The respective light-emitting diodes may be provided with a protectioncircuit for the purpose of protection from overcurrent (e.g. a zenerdiode in (inverse-parallel) parallel connection) at a position notimpeding light extraction.

Next, a thirty-second embodiment of the invention is described, In thethirty-second embodiment, the manufacture of a light source cell unitusing, addition to the blue light-emitting diode and greenlight-emitting diode obtained according to the method of the firstembodiment, a separately provided red light-emitting diode is described.

As shown in FIG. 69A, in the thirty-second embodiment, a necessarynumber of cells 75, each containing at least one of each of a redlight-emitting diode chip 63, a green light-emitting diode chip 64 and ablue light-emitting diode chip 65 and arranged in a given pattern, arearranged in a given pattern on a printed circuit board 76, like thetwenty-ninth embodiment. In this instance, individual cells 75 containone red light-emitting diode chip 63, one green light-emitting diodechip 64 and one blue light-emitting diode chip 65, which are arranged atapexes of a regular triangle. FIG. 69B shows a cell 75 as enlarged. Theinterval a between the red light-emitting diode chip 63, greenlight-emitting diode chip 64 and blue light-emitting diode chip 65 ineach cell 75 is, for example, at 4 mm although not limited to thisvalue. The interval b between the cells 75 is, for example, at 30 mmalthough not limited to this value. For the printed circuit board 76,there can be used, for example, an FR4 (abbreviation of flame retardanttype 4) substrate, a metal core substrate, a flexible printed board orthe like although not limited thereto. This is because others may alsobe used so far as they are printed circuit boards having a heatdissipating property. Like the twenty-ninth embodiment, potting with atransparent resin is effected so as to cover each cell 76 therewith.Alternatively, like the thirtieth embodiment, potting with a transparentresin 69 may be effected so as to cover the red light-emitting diodechip 63, potting with a transparent resin 70 may be carried out to coverthe green light-emitting diode chip 64, and potting with a transparentresin 71 may be carried out to cover the blue light-emitting diode chip65. In this way, the cells 75, each consisting of the red light-emittingdiode chip 63, green light-emitting diode chip 64 and bluelight-emitting diode chip 65, are arranged on the printed circuit board76 to obtain a light source cell unit.

Specific examples of arrangement of the cells 75 in the printed circuitboard 76 are shown in FIGS. 70 and 71, respectively, although notlimited thereto. The instance shown in FIG. 70 is one of which the cells75 are arranged in 4×3 two-dimensional array, and the instance shown inFIG. 71 is one of which the cells 75 are arranged in 6×2 two-dimensionalarray.

FIG. 72 shows other arrangement of the cells 75. In this instance, thecells 75 each contain one red light-emitting diode chip 63, two greenlight-emitting diode chips 64 and one blue light-emitting diode chip 65,which are arranged, for example, at apexes of a square tetragon. The twogreen light-emitting diode chips 64 are placed at vertexes at oppositeends of one diagonal line of the square tetragon, and the redlight-emitting diode chip 63 and the blue light-emitting diode chip 65are arranged at vertexes at opposite ends of another diagonal line.

If this light source cell unit is arrayed singly or plurally, there canbe obtained a light-emitting diode backlight suited, for example, as abacklight of liquid crystal panels.

For the red light-emitting diode chip 63, green light-emitting diodechip 64 and blue light-emitting diode chip 65 of the cell 75, beingshown in FIGS. 7 to 11, particularly in FIG. 11, a double-layer wiringtechnique is used for the wiring of the p-side electrode 19 and n-sideelectrode 21 may be mounted on the printed circuit board 76, or may bemounted on the printed circuit board 76 via a submount.

It will be noted that although it is general that the pad electrodeportions and wiring portions on the printed circuit board 76 areconventionally formed of Au, all or part thereof may be formed of a highmelting metal having good durability and adhesion reinforcement, such asTi, W, Cr or an alloy thereof, or a nitride of the metal, on which Au isformed. These materials may be formed, for example, by electroplating,electroless plating, vacuum deposition (flash deposition), sputtering orthe like. Alternatively, the pad electrode portions or wiring portionsare formed of Au, on which such materials as mentioned above may beformed. Still alternatively, the pad electrode portions or wiringportions may be formed of a high melting metal such as Ti, W, Cr or analloy thereof, which is subsequently nitrided and is again formedthereon with a high melting metal layer such as Ti, W, Cr or an alloythereof so that the surface is returned to the state prior to thenitriding. Thereafter, the light-emitting diode chips 63 to 65 are diebonded from the side of a TiW electrode or an Au electrode, ifnecessary, through a single-layer film made of Ti, W, Cr, Au or thelike.

When mounting protective chips (circuits) connected to thelight-emitting diode chips 63 to 65 mounted on the printed circuit board76, a base-opened transistor device (circuit), a trigger diode device(circuit), a negative resistor device (circuit) and the like, such anelectrode structure as set out above using a high melting metal such asTi, W, Cr or an alloy thereof or a nitride of the metal may be adoptedfor the purpose of improving reliability of the light source cell unitwith respect to adhesion strength, thermal stress durability and thelike.

Portions of the printed circuit board 76 other than the transparentresins 68 to 71 formed by potting may be finally, thickly coated with aresist that is as white as possible so that light from thelight-emitting diode chips 63 to 65 are suppressed from absorption withthe printed circuit board 76.

Although the embodiments of the invention have been particularlyillustrated, this invention should not be construed as limiting to theseembodiments and many variations and alterations may be possible withinthe scope of the invention.

For instance, the numerical values, types of materials, structures,shapes, types of substrate, starting materials, processes andorientations of protruded portion 12 and recess portion 13 indicated infirst to thirty-second embodiments are by way of example only. Ifnecessary, numerical values, materials, structures, shapes, substrates,starting materials and processes that differ from those illustrated maybe used.

More particularly, for example, in the first to thirty-secondembodiments, the p-type layer and n-type layer may be reversed withrespect to the conduction type.

If necessary, two or more of the first to thirty-second embodiments maybe combined.

It will be noted that light-emitting diodes having a patterned indentedsurface structure at a light extraction face or light reflection faceinclude those shown in FIGS. 73 to 76.

In the light-emitting diode shown in FIG. 73, an n-type nitride-basedIII-V Group compound semiconductor layer 82, an n-type nitride-basedIII-V Group compound semiconductor layer 83, an active layer 84, ap-type nitride-based III-V Group compound semiconductor layer 85 and ap-type nitride-based III-V Group compound semiconductor layer 86 aresuccessively grown on a substrate 81. Thereafter, the nitride-basedIII-V Group compound semiconductor layer 83, active layer 84, p-typenitride-based III-V Group compound semiconductor layer 85 and p-typenitride-based III-V Group compound semiconductor layer 86 are etched toform a mesa portion 87. The p-type nitride-based III-V Group compoundsemiconductor layer 86 is subjected to surface indentation and a p-sideelectrode 88 is buried in the recessed portion. An n-side electrode 89is formed on the n-type nitride-based III-V Group compound semiconductorlayer 82 at a portion adjacent to the mesa portion 87. With thislight-emitting diode, light maybe extracted from the side of thesubstrate 81 or may be extracted from the side of the p-typenitride-based III-V Group compound semiconductor layer 86. For thesubstrate 81, such a substrate as the substrate 11 may be used.

In the light-emitting diode shown in FIG. 74, such a structure as shownin FIG. 73 is used except that a reflective film 90 is formed on theback side of the substrate 81. This reflective film 90 permits lightgenerated from the active layer 84 is reflected toward the side of thep-type nitride-based III-V Group compound semiconductor layer 86, sothat light is likely to be extracted from the side of the p-typenitride-based III-V Group compound semiconductor layer 86 to outside.

In the light-emitting diode shown in FIG. 75, such a structure as shownin FIG. 73 is used except that a reflective film 90 is formed on theback side of the p-side nitride-based III-V Group compound semiconductorlayer 86. This reflective film 90 permits light generated from theactive layer 84 to be reflected toward the side of the substrate 11 and,thus light is like to be taken out from the side of the substrate 11 tooutside.

In the light-emitting diode shown in FIG. 76, after epitaxial growth, onthe substrate 81, of the n-type nitride-based III-V Group compoundsemiconductor layer 83, active layer 84 and p-type nitride-based III-VGroup compound semiconductor layer 85, protruded portions 91 are formedthereon, followed by growth of a p-type nitride-based III-V Groupcompound semiconductor layer 86 in the same manner as in the firstembodiment. The protruded portion 91 is similar to the protruded portion12.

It will be noted that in FIG. 76, a reflective electrode may be formedon the p-type nitride-based III-V Group compound semiconductor layer 86in contact with the protruded portion 91. Alternatively, theirrespective of material of the protruded portion 91 being opticallytransparent or reflective, the thickness of the p-type nitride-basedIII-V Group compound semiconductor layer 24 may be properly adjusted,for example, to λ/4, on which a reflective electrode is formed incontact with the protruded portion 91, followed by further formation ofa p-side electrode. This permits a structure in which light generated atthe active layer 84 from arbitrary directions is reflected from the sideof the substrate 81 at high reflectivity while ensuring a good currentpass from the p-side electrode upon operation of the light-emittingdiode.

1. A method for manufacturing a light-emitting diode, which comprisingthe steps of: providing a substrate having a plurality of protrudedportions on one main surface thereof wherein the protruded portion ismade of a material different in type from that of said substrate andgrowing a first nitride-based III-V Group compound semiconductor layeron each recess portion of said substrate through a state of making atriangle in section wherein a bottom surface of the recess portionbecomes a base of the triangle; laterally growing a second nitride-basedIII-V Group compound semiconductor layer on said substrate from saidfirst nitride-based III-V Group compound semiconductor layer; andsuccessively growing a third nitride-based III-V Group compoundsemiconductor layer of a first conduction type, an active layer, and afourth nitride-based III-V compound semiconductor layer of a secondconduction type on said second nitride-based III-V Group compoundsemiconductor layer.
 2. The method according to claim 1, wherein duringthe course of the growth of said first nitride-based III-V Groupcompound semiconductor, when a dislocation generated from an interfacewith the bottom surface of said recess in a direction vertical to theone main surface arrives at an inclined face or its neighborhood of saidfirst nitride-based III-V compound semiconductor layer in such a stateof making a triangle in section, the dislocation is bent in a directionparallel to the one main surface.
 3. The method according to claim 1,wherein said protruded portion has a height of 0.3 μm or over.
 4. Themethod according to claim 1, wherein said protruded portion has a sideface inclines relative to the one main surface and an angle θ madebetween the side face and the one main surface is such that 100<°θ<160°.5. The method according to claim 1, wherein said recess portion has aninverted trapezoid in section.
 6. The method according to claim 5,wherein when a depth of the recess portion is taken as d, a width of thebottom surface of the recess portion is taken as W_(g) and an angle madebetween the inclined face of said first nitride-based III-V compoundsemiconductor layer in a state of making a triangle in section and theone main surface is taken as α, a relationship of 2d≧W_(g) tan α isestablished.
 7. The method according to claim 1, wherein the one mainsurface has the protruded portions and the recess portions alternately.8. The method according to claim 1, wherein the protruded portion has ahexagonal planar shape, being arranged two-dimensionally in the form ofa honeycomb, and the recess portions are formed so as to surroundindividual protruded portions therewith.
 9. The method according toclaim 1, wherein said protruded portion is made of a dielectricmaterial.
 10. The method according to claim 1, wherein said protrudedportion has a refractive index low than a refractive index of saidsubstrate.
 11. The method according to claim 1, wherein after thelateral growth of said second nitride-based III-V compound semiconductorlayer, at least a part of an upper portion of the protruded portionand/or an upper portion of the recess portion of said firstnitride-based III-V compound semiconductor layer and said secondnitride-based III-V compound semiconductor layer is removed, said thirdnitride-based III-V compound semiconductor layer is laterally grown on aleft portion of said second nitride-based III-V compound semiconductorlayer, and said active layer and said fourth nitride-based III-Vcompound semiconductor layer are successively grown on said thirdnitride-based III-V compound semiconductor layer.
 12. The methodaccording to claim 1, wherein after the lateral growth of said secondnitride-based III-V Group compound semiconductor layer, at least a partof an upper portion of the protruded portion and/or an upper portion ofthe recess portion of said first nitride-based III-V compoundsemiconductor layer and said second nitride-based III-V compoundsemiconductor layer is removed, a fifth nitride-based III-V compoundsemiconductor layer is laterally grown on a left portion of said secondnitride-based III-V compound semiconductor layer, and said thirdnitride-based III-V compound semiconductor layer, said active layer andsaid fourth nitride-based III-V compound semiconductor layer aresuccessively grown on said fifth nitride-based III-V compoundsemiconductor layer.
 13. A light-emitting diode which comprises: asubstrate having a plurality of protruded portions on one main surfacethereof wherein the protruded portions are made of a material differentin type from that of the substrate; a sixth nitride-based III-V compoundsemiconductor layer grown on the substrate without formation of a spacein each recess portion of the substrate; and a third nitride-based III-Vcompound semiconductor layer of a first conduction type, an active layerand a fourth nitride-based III-V compound semiconductor layer of asecond conduction type formed on said sixth nitride-based III-V compoundsemiconductor layer, wherein in said sixth nitride-based III-V compoundsemiconductor layer, a dislocation occurring from an interface with abottom surface of the recess portion in a vertical direction relative tothe one main surface arrives at an inclined face of a triangle using abottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.
 14. Amethod for manufacturing an integrated, light-emitting diode wherein aplurality of light-emitting diodes are integrated, the method comprisingthe steps of: providing a substrate having a plurality of protrudedportions on one main surface thereof wherein each protruded portion ismade of a material different in type from that of said substrate andgrowing a first nitride-based III-V Group compound semiconductor layeron each recess portion of the substrate through a state of making atriangle in section wherein a bottom surface of the recess portionbecomes a base of the triangle; laterally growing a second nitride-basedIII-V Group compound semiconductor layer on said substrate from thefirst nitride-based III-V Group compound semiconductor layer; andsuccessively growing a third nitride-based III-V Group compoundsemiconductor layer of a first conduction type, an active layer and afourth nitride-based III-V Group compound semiconductor layer of asecond conduction type on said second nitride-based III-V Group compoundsemiconductor layer.
 15. An integrated, light-emitting diode wherein aplurality of light-emitting diodes are integrated, at least one of theplurality of light-emitting diodes comprising: a substrate having aplurality of protruded portions on one main surface thereof wherein theprotruded portions are made of a material different in type from that ofthe substrate; a sixth nitride-based III-V compound semiconductor layergrown on the substrate without formation of a space in each recessportion of the substrate; and a third nitride-based III-V compoundsemiconductor layer of a first conduction type, an active layer and afourth nitride-based III-V compound semiconductor layer of a secondconduction type formed on the sixth nitride-based III-V compoundsemiconductor layer, wherein in the sixth nitride-based III-V compoundsemiconductor layer, a dislocation occurring from an interface with abottom surface of the recess portion in a vertical direction relative tothe one main surface arrives at an inclined face of a triangle using thebottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.
 16. Amethod for growing a nitride-based III-V compound semiconductor layer,which comprising the steps of: providing a substrate having a pluralityof protruded portions on one main surface thereof wherein each protrudedportion is made of a material different in type from that of thesubstrate and growing a first nitride-based III-V Group compoundsemiconductor layer on each recess portion of the substrate through astate of making a triangle in section wherein a bottom surface of therecess portion becomes a base of the triangle; and laterally growing asecond nitride-based III-V Group compound semiconductor layer on saidsubstrate from said first nitride-based III-V Group compoundsemiconductor layer.
 17. A substrate for growing a nitride-based III-VGroup compound semiconductor layer, which comprising: a substrate havinga plurality of protruded portions on one main surface thereof whereineach protruded portion is made of a material different in type from thatof the substrate; and a sixth nitride-based III-V Group compoundsemiconductor layer grown on said substrate without formation of a spacein each recess portion of the substrate, wherein in said sixthnitride-based III-V compound semiconductor layer, a dislocationoccurring from an interface with a bottom surface of the recess portionin a vertical direction relative to the one main surface arrives at aninclined face of a triangle using the bottom surface of the recessportion as a base or a vicinity thereof and is bent thereat in adirection parallel to the one main surface.
 18. A light source cell unitwhich includes, on a printed wiring board, a plurality of cells eachcontaining at least one of each of a red light-emitting diode, a greenlight-emitting diode and a blue light-emitting diode, at least onelight-emitting diode selected from the red light-emitting diode, greenlight-emitting diode and blue light-emitting diode comprising: asubstrate having a plurality of protruded portions on one main surfacethereof wherein the protruded portions are made of a material differentin type from that of said substrate; a sixth nitride-based III-Vcompound semiconductor layer grown on said substrate without formationof a space in each recess portion of the substrate; and a thirdnitride-based III-V compound semiconductor layer of a first conductiontype, an active layer and a fourth nitride-based III-V compoundsemiconductor layer of a second conduction type formed on said sixthnitride-based III-V compound semiconductor layer, wherein in said sixthnitride-based III-V compound semiconductor layer, a dislocationoccurring from an interface with a bottom surface of the recess portionin a vertical direction relative to the one main surface arrives at aninclined face of a triangle using the bottom surface of the recessportion as a base or a vicinity thereof and is bent thereat in adirection parallel to the one main surface.
 19. A light-emitting diodebacklight wherein a red light-emitting diode, a green light-emittingdiode and a blue light-emitting diode, each being plural in number, arearranged, at least one type of light-emitting diode selected from thered light-emitting diode, green light-emitting diode and bluelight-emitting diode comprising: a substrate having a plurality ofprotruded portions on one main surface thereof wherein the protrudedportions are made of a material different in type from that of thesubstrate; a sixth nitride-based III-V compound semiconductor layergrown on the substrate without formation of a space in each recessportion of the substrate; and a third nitride-based III-V compoundsemiconductor layer of a first conduction type, an active layer and afourth nitride-based III-V compound semiconductor layer of a secondconduction type formed on the sixth nitride-based III-V compoundsemiconductor layer, wherein in the sixth nitride-based III-V compoundsemiconductor layer, a dislocation occurring from an interface with abottom surface of the recess portion in a vertical direction relative tothe one main surface arrives at an inclined face of a triangle using thebottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.
 20. Alight-emitting diode illuminating device wherein a red light-emittingdiode, a green light-emitting diode and a blue light-emitting diode,each being plural in number, are arranged, at least one type oflight-emitting diode selected from the red light-emitting diode, greenlight-emitting diode and blue light-emitting diode comprising: asubstrate having a plurality of protruded portions on one main surfacethereof wherein the protruded portions are made of a material differentin type from that of the substrate; a sixth nitride-based III-V compoundsemiconductor layer grown on the substrate without formation of a spacein each recess portion of the substrate; and a third nitride-based III-Vcompound semiconductor layer of a first conduction type, an active layerand a fourth nitride-based III-V compound semiconductor layer of asecond conduction type formed on the sixth nitride-based III-V compoundsemiconductor layer, wherein in the sixth nitride-based III-V compoundsemiconductor layer, a dislocation occurring from an interface with abottom surface of the recess portion in a vertical direction relative tothe one main surface arrives at an inclined face of a triangle using thebottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.
 21. Alight-emitting diode display wherein a red light-emitting diode, a greenlight-emitting diode and a blue light-emitting diode, each being pluralin number, are arranged, at least one type of light-emitting diodeselected from the red light-emitting diode, green light-emitting diodeand blue light-emitting diode comprising: a substrate having a pluralityof protruded portions on one main surface thereof wherein the protrudedportions are made of a material different in type from that of thesubstrate; a sixth nitride-based III-V compound semiconductor layergrown on the substrate without formation of a space in each recessportion of the substrate; and a third nitride-based III-V compoundsemiconductor layer of a first conduction type, an active layer and afourth nitride-based III-V compound semiconductor layer of a secondconduction type formed on the sixth nitride-based III-V compoundsemiconductor layer, wherein in the sixth nitride-based III-V compoundsemiconductor layer, a dislocation occurring from an interface with abottom surface of the recess portion in a vertical direction relative tothe one main surface arrives at an inclined face of a triangle using thebottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.
 22. Anelectronic device having one or plural light-emitting diodes, at leastone of the light-emitting diodes comprising: a substrate having aplurality of protruded portions on one main surface thereof wherein theprotruded portions are made of a material different in type from that ofthe substrate; a sixth nitride-based III-V compound semiconductor layergrown on the substrate without formation of a space in each recessportion of the substrate; and a third nitride-based III-V compoundsemiconductor layer of a first conduction type, an active layer and afourth nitride-based III-V compound semiconductor layer of a secondconduction type formed on the sixth nitride-based III-V compoundsemiconductor layer, wherein in the sixth nitride-based III-V compoundsemiconductor layer, a dislocation occurring from an interface with abottom surface of the recess portion in a vertical direction relative tothe one main surface arrives at an inclined face of a triangle using thebottom surface of the recess portion as a base or a vicinity thereof andis bent thereat in a direction parallel to the one main surface.
 23. Amethod for manufacturing an electronic device, comprising the steps of:providing a substrate having a plurality of protruded portions on onemain surface thereof wherein each protruded portion is made of amaterial different in type from that of said substrate and growing afirst layer on each recess portion of the substrate through a state ofmaking a triangle in section wherein a bottom surface of the recessportion becomes a base of the triangle; and laterally growing a secondlayer from said first layer on said substrate.
 24. An electronic devicewhich comprises: a substrate having a plurality of protruded portions onone main surface thereof wherein each protruded portion is made of amaterial different in type from that of the substrate; and a third layergrown on said substrate without formation of a space in each recessportion of the substrate, wherein in the third layer, a dislocationoccurring from an interface with a bottom surface of the recess portionin a vertical direction relative to the one main surface arrives at aninclined face of a triangle using the bottom surface of the recessportion as a base or a vicinity thereof and is bent thereat in adirection parallel to the one main surface.